Development of MEMS multi-mode electrostatic energy harvester based on the SOI process

Bongwon Jeong, Min Ook Kim, Jae Ik Lee, Youngkee Eun, Jungwook Choi, Jongbaeg Kim

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-shaped inertial mass. The experimental results show that the developed device could convert an input vibration of 6 g at 1272 Hz to 2.96, 3.28, and 2.30 μW for different vibrational directions of 0°, 30°, and 45° with respect to a reference direction, respectively, when all serpentine springs are identical. An alternative device design using serpentine springs with different stiffnesses between x- and y-axes exhibited resonance frequencies at 1059 and 1635 Hz for an input vibrational direction of 45° and acceleration amplitude of 4 g, successfully generating 0.723 and 0.927 μW of electrical power at each resonance, respectively.

Original languageEnglish
Article number51
JournalMicromachines
Volume8
Issue number2
DOIs
Publication statusPublished - 2017 Jan 1

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Harvesters
MEMS
Electrostatics
Silicon
Stiffness

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Jeong, Bongwon ; Kim, Min Ook ; Lee, Jae Ik ; Eun, Youngkee ; Choi, Jungwook ; Kim, Jongbaeg. / Development of MEMS multi-mode electrostatic energy harvester based on the SOI process. In: Micromachines. 2017 ; Vol. 8, No. 2.
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Development of MEMS multi-mode electrostatic energy harvester based on the SOI process. / Jeong, Bongwon; Kim, Min Ook; Lee, Jae Ik; Eun, Youngkee; Choi, Jungwook; Kim, Jongbaeg.

In: Micromachines, Vol. 8, No. 2, 51, 01.01.2017.

Research output: Contribution to journalArticle

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AU - Kim, Min Ook

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AU - Eun, Youngkee

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AU - Kim, Jongbaeg

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