Abstract
A numerical method to model the surface of a reflowed square microlens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8×4.8m and sag height of 1.55m was fabricated and the modelling accuracy was compared and analysed.
| Original language | English |
|---|---|
| Pages (from-to) | 492-493 |
| Number of pages | 2 |
| Journal | Electronics Letters |
| Volume | 44 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 2008 Mar 31 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
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Kim, S. M., Choi, M., Kim, H., Lim, J., & Kang, S. (2008). Development of method to model surface of reflowed square microlens for image sensor. Electronics Letters, 44(7), 492-493. https://doi.org/10.1049/el:20080351