Abstract
A numerical method to model the surface of a reflowed square microlens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8×4.8m and sag height of 1.55m was fabricated and the modelling accuracy was compared and analysed.
Original language | English |
---|---|
Pages (from-to) | 492-493 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 44 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2008 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering