Development of method to model surface of reflowed square microlens for image sensor

S. M. Kim; M. Choi; H. Kim; J. Lim; S. Kang

doi:10.1049/el:20080351

Development of method to model surface of reflowed square microlens for image sensor

S. M. Kim, M. Choi, H. Kim, J. Lim, S. Kang

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A numerical method to model the surface of a reflowed square microlens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8×4.8m and sag height of 1.55m was fabricated and the modelling accuracy was compared and analysed.

Original language	English
Pages (from-to)	492-493
Number of pages	2
Journal	Electronics Letters
Volume	44
Issue number	7
DOIs	https://doi.org/10.1049/el:20080351
Publication status	Published - 2008

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

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abstract = "A numerical method to model the surface of a reflowed square microlens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8×4.8m and sag height of 1.55m was fabricated and the modelling accuracy was compared and analysed.",

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AU - Kang, S.

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AB - A numerical method to model the surface of a reflowed square microlens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8×4.8m and sag height of 1.55m was fabricated and the modelling accuracy was compared and analysed.

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