Development of optical inspection system for detecting malfunctions of digital micromirror device

Minwook Kang, Dong Won Kang, Wondong Lee, Jae W. Hahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Maskless lithography (ML) systems have been researched as an alternative technologies of the conventional photolithography systems. Digital micromirror devices (DMD) can be used in ML systems as a role of photomask in the conventional photolithography systems. For high-throughput manufacturing processes DMDs in ML systems must be driven to their operational limits, often in harsh conditions. We propose an optical system and detection methodologies to detect DMD malfunctions to ensure perfect mask image transfer to the photoresist in ML systems. We categorize DMD malfunctions into two types. One is bad DMD pixel caused from mechanical defect and the other is data transfer error. We detect bad DMD pixels with 20×20 pixels using white and black image tests. We confirm data transfer errors at high frame rate operation of DMD by monitoring changes in the frame rate of a target DMD pixel driven by the input data with a set frame rate of up to 28,000 frames per second (fps).

Original languageEnglish
Title of host publicationInternational Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014
EditorsAulia Nasution
PublisherSPIE
ISBN (Electronic)9781628415599
DOIs
Publication statusPublished - 2015
EventInternational Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014 - Sanur, Bali, Indonesia
Duration: 2014 Oct 142014 Oct 15

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9444
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherInternational Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014
CountryIndonesia
CitySanur, Bali
Period14/10/1414/10/15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Kang, M., Kang, D. W., Lee, W., & Hahn, J. W. (2015). Development of optical inspection system for detecting malfunctions of digital micromirror device. In A. Nasution (Ed.), International Seminar on Photonics, Optics, and Its Applications, ISPhOA 2014 [944417] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9444). SPIE. https://doi.org/10.1117/12.2075175