Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy

Jiseok Lim, Myungki Jung, Seo Young Hwang, Shinill Kang

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Optical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 × 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 × 1 mm2 images were examined using an XY-translation nanostage scanning with a travel length of 100 μm.

Original languageEnglish
Article number06F702
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume30
Issue number6
DOIs
Publication statusPublished - 2012 Nov 1

Fingerprint

Confocal microscopy
Optical systems
misalignment
adjusting
microscopy
Imaging techniques
probes
high resolution
Scanning
scanning
travel
inspection
Lenses
Electronic equipment
Inspection
Fluorescence
Display devices
lenses
fluorescence
electronics

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

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Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy. / Lim, Jiseok; Jung, Myungki; Young Hwang, Seo; Kang, Shinill.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 30, No. 6, 06F702, 01.11.2012.

Research output: Contribution to journalArticle

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