Development of optical system with rotational misalignment adjustment for multi-optical-probe confocal microscopy

Jiseok Lim, Myungki Jung, Seo Young Hwang, Shinill Kang

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Optical scanning confocal microscopy enables high-resolution imaging and optical sectioning for three-dimensional imaging. Technologies to improve confocal microscopy are being developed for applications, such as real-time bioinspection, fluorescence sample imaging, and ultra-high-resolution measurement. Recently, the need for high-resolution large-area inspection of electronics has been increasing rapidly, including large-area display panels. Therefore, the authors constructed an optical system for multi-optical-probe confocal microscopy. A 10 × 10 micro-objective-lens array was fabricated with high fidelity using an ultraviolet nanoimprinting process. To investigate the utility of this system, 1 × 1 mm2 images were examined using an XY-translation nanostage scanning with a travel length of 100 μm.

Original languageEnglish
Article number06F702
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume30
Issue number6
DOIs
Publication statusPublished - 2012 Nov

Bibliographical note

Funding Information:
This research was supported by the Korea National Research Foundation grant funded by the Korean government (MEST) (No. 2011-0000305).

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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