Development of sol-gel precursor system for direct-patternable PZT ferroelectric films containing la as a dopant

Sangwoo Bae, Jae Seob Hwang, Woo Sik Kim, Hyung Ho Park, Tae Song Kim

Research output: Contribution to journalConference article

Abstract

Direct-patternable lanthanum substituted lead zirconate titanate (PLZT) films were prepared by sol-gel technique using orth-nitrobenzaldehyde as a photosensitive agent. PLZT films with various La concentration were formed on Pt(111)/Ti/SiO2/Si(100) substrate for direct-patterning of PLZT films and ferroelectric properties measurement. A well-defined and direct-patterned PLZT film was obtained and the improvement of leakage current density, fatigue resistance and dielectric constant with increased substitution of La in PLZT film were observed especially with 4 mol% La doped PLZT film. From this result, we confirmed that direct-patternable PLZT film is suitable for application in micro device.

Original languageEnglish
Pages (from-to)83-91
Number of pages9
JournalIntegrated Ferroelectrics
Volume69
DOIs
Publication statusPublished - 2005 Dec 1
Event16th International Symposium on Integrated Ferroelectrics, ISIF-16 - Gyeongju, Korea, Republic of
Duration: 2004 Apr 52004 Apr 8

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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