Development of thin film getters suitable for field-emission display in high vacuum systems

Kyung Chan Kim, Han Jin Ahn, Young Joon Yoon, Hong Koo Baik, Sung Man Lee, Se Jong Lee

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The development of thin Zr film getters which are suitable for field-emission display in high vacuum microelectronics was analyzed. Ni and Pt films were used for catalysis and protection of the getter from oxidation. Getters with a Ni or Pt protection layer exhibited excellent adsorption characteristics for some impurity gases. It was also observed that the impurity gas was chemically absorbed and dissociated by Pt and Zr films the CO gas got eliminated.

Original languageEnglish
Pages (from-to)2533-2537
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number5
DOIs
Publication statusPublished - 2004 Sep 1

Fingerprint

getters
Getters
Field emission displays
vacuum systems
high vacuum
field emission
Vacuum
Thin films
thin films
Gases
gases
Impurities
impurities
microelectronics
Microelectronics
Catalysis
catalysis
Adsorption
Oxidation
oxidation

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Kim, Kyung Chan ; Ahn, Han Jin ; Yoon, Young Joon ; Baik, Hong Koo ; Lee, Sung Man ; Lee, Se Jong. / Development of thin film getters suitable for field-emission display in high vacuum systems. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004 ; Vol. 22, No. 5. pp. 2533-2537.
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Development of thin film getters suitable for field-emission display in high vacuum systems. / Kim, Kyung Chan; Ahn, Han Jin; Yoon, Young Joon; Baik, Hong Koo; Lee, Sung Man; Lee, Se Jong.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 22, No. 5, 01.09.2004, p. 2533-2537.

Research output: Contribution to journalArticle

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