Dielectrically-supported multi-element mass flow sensor

E. Yoon, K. D. Wise

Research output: Contribution to journalConference article

9 Citations (Scopus)

Abstract

The author reports a monolithic transducer array for measuring the physical variables associated with gas flow. The transducers are supported on micromachined dielectric windows and measure flow velocity, flow direction, ambient gas temperature, and ambient pressure. The gas velocity sensor is based on a full-diaphragm structure and for a 1-mm × 1-mm window achieves an output voltage of 34 mV/V at 5 m/s flow velocity in air with an input heater power of 13.9 mW. The polysilicon pressure sensor has a sensitivity of 12 ppm/mm Hg and operates over a range of more than 800 mm Hg. Generic thermal models have been developed to describe the electrothermal characteristics of the planar diaphragm structure and to optimize the device designs. The process requires seven masks, and the overall die size is 3 mm × 4.5 mm.

Original languageEnglish
Pages (from-to)670-673
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
Publication statusPublished - 1988 Dec 1
EventTechnical Digest - International Electron Devices Meeting 1988 - San Francisco, CA, USA
Duration: 1988 Dec 111988 Dec 14

Fingerprint

mass flow
diaphragms
Diaphragms
Flow velocity
Transducers
transducers
flow velocity
Gases
sensors
Sensors
Pressure sensors
pressure sensors
gas temperature
heaters
Polysilicon
ambient temperature
gas flow
Flow of gases
Masks
masks

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

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Dielectrically-supported multi-element mass flow sensor. / Yoon, E.; Wise, K. D.

In: Technical Digest - International Electron Devices Meeting, 01.12.1988, p. 670-673.

Research output: Contribution to journalConference article

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AU - Wise, K. D.

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AB - The author reports a monolithic transducer array for measuring the physical variables associated with gas flow. The transducers are supported on micromachined dielectric windows and measure flow velocity, flow direction, ambient gas temperature, and ambient pressure. The gas velocity sensor is based on a full-diaphragm structure and for a 1-mm × 1-mm window achieves an output voltage of 34 mV/V at 5 m/s flow velocity in air with an input heater power of 13.9 mW. The polysilicon pressure sensor has a sensitivity of 12 ppm/mm Hg and operates over a range of more than 800 mm Hg. Generic thermal models have been developed to describe the electrothermal characteristics of the planar diaphragm structure and to optimize the device designs. The process requires seven masks, and the overall die size is 3 mm × 4.5 mm.

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