Direct replication of a glass micro Fresnel zone plate array by laser irradiation using an infrared transmissive mold

Runjia Han, Juho Lee, Baekcheon Seong, Ryung Shin, Donghyun Kim, Changsu Park, Jiseok Lim, Chulmin Joo, Shinill Kang

Research output: Contribution to journalArticlepeer-review

Abstract

It is not yet possible to fabricate micrometer-scale, glass optical components with nanometer-scale precision. Glass thermal imprinting enhances production efficiency. However, dimensional changes caused by shrinkage are inevitable because of phase transitions. Replication is very difficult when high-level pitch precision is essential. We used an infrared-transparent silicon mold and a CO2 laser to perform replica-type, thermal surface texturing at the nanoscale level; we analyzed a glass Fresnel zone plate array to this end. The Fresnel zone plate array was 10 × 10 mm2 in area and featured a 20 × 20 array. The individual Fresnel zone plate diameter was 500 μm and had 21 rings of minimum linewidth 2.9 μm and height 737 nm.

Original languageEnglish
Pages (from-to)18468-18480
Number of pages13
JournalOptics Express
Volume28
Issue number12
DOIs
Publication statusPublished - 2020 Jun 8

Bibliographical note

Funding Information:
National Research Foundation of Korea (2015R1A5A1037668); Ministry of Trade, Industry and Energy (N0002310).

Publisher Copyright:
© 2020 Optical Society of America.

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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