Direct Visualization of Etching Trajectories in Metal-Assisted Chemical Etching of Si by the Chemical Oxidation of Porous Sidewalls

Sung Soo Yoon, Dahl-Young Khang

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We demonstrate a simple method for the visualization of trajectories traced by noble metal nanoparticles during metal-assisted chemical etching (MaCE) of Si. The nanoporous Si layer formed around drilled pores is converted into SiO2 by simple chemical oxidation. Etch removal of the remaining Si using alkali hydroxide leaves SiO2 nanostructures that are the exact replica of those drilled pores or etching trajectories. The differences in etching characteristics between Ag and Au have been investigated using the proposed visualization method. The shape and chemical stability of metal nanoparticles used for MaCE have been found to be critical in determining etching paths. The proposed method would be very helpful in studying the fundamental mechanism of MaCE as well as in micro/nanostructuring of the Si surface for various applications. This approach can also be used for the generation of straight or helical SiO2 nanotubes.

Original languageEnglish
Pages (from-to)10549-10554
Number of pages6
JournalLangmuir
Volume31
Issue number38
DOIs
Publication statusPublished - 2015 Sep 29

Fingerprint

Etching
Visualization
Metals
Trajectories
etching
trajectories
Oxidation
oxidation
metals
Metal nanoparticles
porosity
nanoparticles
Chemical stability
Alkalies
Precious metals
noble metals
replicas
leaves
Nanotubes
hydroxides

All Science Journal Classification (ASJC) codes

  • Electrochemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Materials Science(all)
  • Spectroscopy

Cite this

@article{605c9e23e9be4dcd9edc09c98318ddf4,
title = "Direct Visualization of Etching Trajectories in Metal-Assisted Chemical Etching of Si by the Chemical Oxidation of Porous Sidewalls",
abstract = "We demonstrate a simple method for the visualization of trajectories traced by noble metal nanoparticles during metal-assisted chemical etching (MaCE) of Si. The nanoporous Si layer formed around drilled pores is converted into SiO2 by simple chemical oxidation. Etch removal of the remaining Si using alkali hydroxide leaves SiO2 nanostructures that are the exact replica of those drilled pores or etching trajectories. The differences in etching characteristics between Ag and Au have been investigated using the proposed visualization method. The shape and chemical stability of metal nanoparticles used for MaCE have been found to be critical in determining etching paths. The proposed method would be very helpful in studying the fundamental mechanism of MaCE as well as in micro/nanostructuring of the Si surface for various applications. This approach can also be used for the generation of straight or helical SiO2 nanotubes.",
author = "Yoon, {Sung Soo} and Dahl-Young Khang",
year = "2015",
month = "9",
day = "29",
doi = "10.1021/acs.langmuir.5b02453",
language = "English",
volume = "31",
pages = "10549--10554",
journal = "Langmuir",
issn = "0743-7463",
publisher = "American Chemical Society",
number = "38",

}

Direct Visualization of Etching Trajectories in Metal-Assisted Chemical Etching of Si by the Chemical Oxidation of Porous Sidewalls. / Yoon, Sung Soo; Khang, Dahl-Young.

In: Langmuir, Vol. 31, No. 38, 29.09.2015, p. 10549-10554.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Direct Visualization of Etching Trajectories in Metal-Assisted Chemical Etching of Si by the Chemical Oxidation of Porous Sidewalls

AU - Yoon, Sung Soo

AU - Khang, Dahl-Young

PY - 2015/9/29

Y1 - 2015/9/29

N2 - We demonstrate a simple method for the visualization of trajectories traced by noble metal nanoparticles during metal-assisted chemical etching (MaCE) of Si. The nanoporous Si layer formed around drilled pores is converted into SiO2 by simple chemical oxidation. Etch removal of the remaining Si using alkali hydroxide leaves SiO2 nanostructures that are the exact replica of those drilled pores or etching trajectories. The differences in etching characteristics between Ag and Au have been investigated using the proposed visualization method. The shape and chemical stability of metal nanoparticles used for MaCE have been found to be critical in determining etching paths. The proposed method would be very helpful in studying the fundamental mechanism of MaCE as well as in micro/nanostructuring of the Si surface for various applications. This approach can also be used for the generation of straight or helical SiO2 nanotubes.

AB - We demonstrate a simple method for the visualization of trajectories traced by noble metal nanoparticles during metal-assisted chemical etching (MaCE) of Si. The nanoporous Si layer formed around drilled pores is converted into SiO2 by simple chemical oxidation. Etch removal of the remaining Si using alkali hydroxide leaves SiO2 nanostructures that are the exact replica of those drilled pores or etching trajectories. The differences in etching characteristics between Ag and Au have been investigated using the proposed visualization method. The shape and chemical stability of metal nanoparticles used for MaCE have been found to be critical in determining etching paths. The proposed method would be very helpful in studying the fundamental mechanism of MaCE as well as in micro/nanostructuring of the Si surface for various applications. This approach can also be used for the generation of straight or helical SiO2 nanotubes.

UR - http://www.scopus.com/inward/record.url?scp=84942797238&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84942797238&partnerID=8YFLogxK

U2 - 10.1021/acs.langmuir.5b02453

DO - 10.1021/acs.langmuir.5b02453

M3 - Article

VL - 31

SP - 10549

EP - 10554

JO - Langmuir

JF - Langmuir

SN - 0743-7463

IS - 38

ER -