Direct-write scanning probe lithography: Towards a desktop fab

Louise R. Giam, Andrew J. Senesi, Xing Liao, Lu Shin Wong, Jinan Chai, Daniel J. Eichelsdoerfer, Wooyoung Shim, Boris Rasin, Shu He, Chad A. Mirkin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Massively parallel scanning-probe based methods have been used to address the challenges of nanometer to millimeter scale printing for a variety of materials and mark a step towards the realization of a "desktop fab." Such tools enable simple, flexible, high-throughput, and low-cost nano- and microscale patterning, which allow researchers to rapidly synthesize and study systems ranging from nanoparticle synthesis to biological processes. We have developed a novel scanning probe-based cantilever-free printing method termed polymer pen lithography (PPL), which uses an array of elastomeric tips to transfer materials (e.g. alkanethiols, proteins, polymers) in a direct-write manner onto a variety of surfaces. This technique takes the best attributes of dip-pen nanolithography (DPN) and eliminates many of the disadvantages of contact printing. Various related techniques such as beam pen lithography (BPL), scanning probe block copolymer lithography (SPBCL), and hard-tip, soft spring lithography (HSL) are also discussed.

Original languageEnglish
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications III
DOIs
Publication statusPublished - 2011 Jun 9
EventMicro- and Nanotechnology Sensors, Systems, and Applications III - Orlando, FL, United States
Duration: 2011 Apr 252011 Apr 29

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8031
ISSN (Print)0277-786X

Other

OtherMicro- and Nanotechnology Sensors, Systems, and Applications III
CountryUnited States
CityOrlando, FL
Period11/4/2511/4/29

Fingerprint

Lithography
pens
Scanning
Probe
lithography
printing
Printing
scanning
probes
Polymers
Light pens
Nanolithography
Block Copolymers
Cantilever
polymers
Patterning
block copolymers
microbalances
High Throughput
Block copolymers

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Giam, L. R., Senesi, A. J., Liao, X., Wong, L. S., Chai, J., Eichelsdoerfer, D. J., ... Mirkin, C. A. (2011). Direct-write scanning probe lithography: Towards a desktop fab. In Micro- and Nanotechnology Sensors, Systems, and Applications III [803103] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8031). https://doi.org/10.1117/12.884665
Giam, Louise R. ; Senesi, Andrew J. ; Liao, Xing ; Wong, Lu Shin ; Chai, Jinan ; Eichelsdoerfer, Daniel J. ; Shim, Wooyoung ; Rasin, Boris ; He, Shu ; Mirkin, Chad A. / Direct-write scanning probe lithography : Towards a desktop fab. Micro- and Nanotechnology Sensors, Systems, and Applications III. 2011. (Proceedings of SPIE - The International Society for Optical Engineering).
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Giam, LR, Senesi, AJ, Liao, X, Wong, LS, Chai, J, Eichelsdoerfer, DJ, Shim, W, Rasin, B, He, S & Mirkin, CA 2011, Direct-write scanning probe lithography: Towards a desktop fab. in Micro- and Nanotechnology Sensors, Systems, and Applications III., 803103, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, Orlando, FL, United States, 11/4/25. https://doi.org/10.1117/12.884665

Direct-write scanning probe lithography : Towards a desktop fab. / Giam, Louise R.; Senesi, Andrew J.; Liao, Xing; Wong, Lu Shin; Chai, Jinan; Eichelsdoerfer, Daniel J.; Shim, Wooyoung; Rasin, Boris; He, Shu; Mirkin, Chad A.

Micro- and Nanotechnology Sensors, Systems, and Applications III. 2011. 803103 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8031).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Giam LR, Senesi AJ, Liao X, Wong LS, Chai J, Eichelsdoerfer DJ et al. Direct-write scanning probe lithography: Towards a desktop fab. In Micro- and Nanotechnology Sensors, Systems, and Applications III. 2011. 803103. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.884665