Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate

Cheolmin Park, Joy Y. Cheng, Michael J. Fasolka, Anne M. Mayes, C. A. Ross, Edwin L. Thomas, Claudio De Rosa

Research output: Contribution to journalArticle

67 Citations (Scopus)

Abstract

Directional solidification of cylinder forming block copolymer films confined between a directionally crystallizing solvent (benzoic acid) and a topographically patterned silicon substrate imparts a particular orientation to the block copolymer microdomains that is dependent of the solidification direction and the local film thickness. The substrate features (30 nm high, 2μm wide square mesas on a 4μm sq lattice) shape the film morphology by periodically modulating the local film thickness. Thicker regions between substrate features (plateaus) exhibit in-plane cylinders aligned in the crystallization direction and thinner regions over the substrate features (mesas) display vertically aligned cylindrical domains. This approach is a simple and general technique for engineering an intended domain orientation in specific areas of a block copolymer film. Development of this method for nanolithographic applications is demonstrated through oxygen plasma reactive ion etching of the patterned cylindrical domains.

Original languageEnglish
Pages (from-to)848-850
Number of pages3
JournalApplied Physics Letters
Volume79
Issue number6
DOIs
Publication statusPublished - 2001 Aug 6

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block copolymers
mesas
film thickness
benzoic acid
oxygen plasma
solidification
plateaus
etching
engineering
crystallization
silicon
ions

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Park, Cheolmin ; Cheng, Joy Y. ; Fasolka, Michael J. ; Mayes, Anne M. ; Ross, C. A. ; Thomas, Edwin L. ; De Rosa, Claudio. / Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate. In: Applied Physics Letters. 2001 ; Vol. 79, No. 6. pp. 848-850.
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Double textured cylindrical block copolymer domains via directional solidification on a topographically patterned substrate. / Park, Cheolmin; Cheng, Joy Y.; Fasolka, Michael J.; Mayes, Anne M.; Ross, C. A.; Thomas, Edwin L.; De Rosa, Claudio.

In: Applied Physics Letters, Vol. 79, No. 6, 06.08.2001, p. 848-850.

Research output: Contribution to journalArticle

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