Bias sputtering was employed to reduce the bombardment to the growing film by negative metal oxide ions or negative oxygen ions. Polycrystalline La-Ba-Mn-O thin films were grown using rf magnetron sputtering on Si (100) substrates. The temperature dependence of electrical resistivity was shown for films with grounded or negatively biased substrate.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2002 Nov|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films