Abstract
Figure Presented Drawing lithography is a novel fabrication technique in which a thermosetting polymer is directly drawn from a two-dimensional solid surface without the need for a mask and light irradiation (see figure). Drawing lithography differs from traditional lithography techniques, such as photolithography, in that it is based on the inherently planar geometries of a two-dimensional substrate in a three-dimensional microstructure.
Original language | English |
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Pages (from-to) | 483-486 |
Number of pages | 4 |
Journal | Advanced Materials |
Volume | 22 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2010 Jan 26 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering