This article presents a new design of a silicon-based microcalorimeter made with dual thermopiles and a microchannel. The dual thermopile was fabricated with chromium and copper using a microelectromechanical system (MEMS) technique, and the microchannel was made of PDMS using soft-lithography. Each thermopile consists of 26 thermocouple pairs and 50 μm wide electrodes. The total sensitivity of thermopile is 428 μV/K. The dual thermopile system enables the microcalorimeter to acquire reliable data in a rapid and convenient manner because it detects the reaction and reference temperatures simultaneously. This self-compensation allows our device to analyze a few microliters of sample solution without the need for a surrounding adiabatic vacuum.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry