This article presents a new design of a silicon-based microcalorimeter made with dual thermopiles and a microchannel. The dual thermopile was fabricated with chromium and copper using a microelectromechanical system (MEMS) technique, and the microchannel was made of PDMS using soft-lithography. Each thermopile consists of 26 thermocouple pairs and 50 μm wide electrodes. The total sensitivity of thermopile is 428 μV/K. The dual thermopile system enables the microcalorimeter to acquire reliable data in a rapid and convenient manner because it detects the reaction and reference temperatures simultaneously. This self-compensation allows our device to analyze a few microliters of sample solution without the need for a surrounding adiabatic vacuum.
Bibliographical noteFunding Information:
Acknowledgments This work was supported by Basic Research Program of the Korea Science & Engineering Foundation (Grant no. R01-2005-000-10160-0(2006)), ICBIN of Seoul R&BD program
(Grant no. 10816), and National Core Research Center for Nano-medical Technology of the Korea Science & Engineering Foundation (Grant no. R15-2004-024-01001-0).
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry