Dual-wavelength digital holography with a single low-coherence light source

Sungbin Jeon, Janghyun Cho, Ji Nan Jin, No Cheol Park, Young Pil Park

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.

Original languageEnglish
Pages (from-to)18408-18416
Number of pages9
JournalOptics Express
Volume24
Issue number16
DOIs
Publication statusPublished - 2016 Aug 8

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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