Dual-wavelength digital holography with a single low-coherence light source

Sungbin Jeon, Janghyun Cho, Ji Nan Jin, No Cheol Park, Young Pil Park

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.

Original languageEnglish
Pages (from-to)18408-18416
Number of pages9
JournalOptics Express
Volume24
Issue number16
DOIs
Publication statusPublished - 2016 Aug 8

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holography
light sources
wavelengths
rangefinding
illuminating
field of view
topography
interferometry
light emitting diodes
bandwidth
microstructure
profiles
configurations

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Jeon, Sungbin ; Cho, Janghyun ; Jin, Ji Nan ; Park, No Cheol ; Park, Young Pil. / Dual-wavelength digital holography with a single low-coherence light source. In: Optics Express. 2016 ; Vol. 24, No. 16. pp. 18408-18416.
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Dual-wavelength digital holography with a single low-coherence light source. / Jeon, Sungbin; Cho, Janghyun; Jin, Ji Nan; Park, No Cheol; Park, Young Pil.

In: Optics Express, Vol. 24, No. 16, 08.08.2016, p. 18408-18416.

Research output: Contribution to journalArticle

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