Edge tool influence function library using the parametric edge model for computer controlled optical surfacing

Dae Wook Kim, Won Hyun Park, Sug Whan Kim, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

Computer controlled optical surfacing (CCOS) requires accurate knowledge of the tool influence function (TIF) for the polishing tool. The linear Preston's model for material removal has been used to determine the TIF for most cases. As the tool runs over the edge of the workpiece, however, nonlinear removal behavior needs to be considered to model the edge TIF. We reported a new parametric edge TIF model in a previous paper.* This model fits 5 parameters to measured data to accurately predict the edge TIF. We present material from the previous paper, and provide a library of the parametric edge TIFs for various tool shape and motion cases. The edge TIF library is a useful reference to design an edge figuring process using a CCOS technique.

Original languageEnglish
Title of host publicationOptical Manufacturing and Testing VIII
DOIs
Publication statusPublished - 2009
EventOptical Manufacturing and Testing VIII - San Diego, CA, United States
Duration: 2009 Aug 42009 Aug 5

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7426
ISSN (Print)0277-786X

Other

OtherOptical Manufacturing and Testing VIII
Country/TerritoryUnited States
CitySan Diego, CA
Period09/8/409/8/5

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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