Effect of CeO2 addition on the performance of a Ta barrier for high-density memory device applications

Dong Soo Yoon, Lee Sung-Man, Hong Koo Baik

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of CeO<sub>2</sub> addition on the performance of a Ta barrier for high-density memory device applications'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemistry