Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film

Hwan Seong Moon, Jae Suk Lee, Sung Wook Han, Jong Wan Park, Jae Hak Lee, Seung Kee Yang, Hyung Ho Park

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science