Fingerprint
Dive into the research topics of 'Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film
Hwan Seong Moon, Jae Suk Lee, Sung Wook Han, Jong Wan Park, Jae Hak Lee, Seung Kee Yang, Hyung Ho Park
Research output: Contribution to journal › Article › peer-review
12
Citations
(Scopus)