Effect of different etching processes on edge breakdown suppression for planar InP/InGaAs avalanche photodiodes

Bongyong Lee, Ilgu Yun

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint Dive into the research topics of 'Effect of different etching processes on edge breakdown suppression for planar InP/InGaAs avalanche photodiodes'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science