Effect of elevated annealing temperature on the microstructure and nano-hardness of ZnO films deposited by the sol-gel process

Li Yu Lin, Dae Eun Kim

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

ZnO films deposited on Si substrates by the sol-gel process were characterized by transmission electron microscopy and energy dispersive X-ray spectroscopy to investigate the effect of annealing temperature (550°C and 800°C) on their microstructures and compositions. When the ZnO film was annealed at a temperature of 800°C, excess Zn atoms was formed in the ZnO film due to the thermal decomposition of ZnO into Zn and O atoms, creating a Zn/ZnO composite film. It was proposed that the excess Zn atoms in the Zn/ZnO composite film may serve to improve the resistance to dislocation motion within the ZnO film, thus increasing the strength of the film. Nanoindentation tests confirmed that the high annealing temperature was beneficial to increase the hardness of the ZnO film.

Original languageEnglish
Pages (from-to)2005-2009
Number of pages5
JournalInternational Journal of Precision Engineering and Manufacturing
Volume13
Issue number11
DOIs
Publication statusPublished - 2012 Dec 1

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Nanohardness
Sol-gel process
Annealing
Microstructure
Composite films
Atoms
Temperature
Nanoindentation
Pyrolysis
Hardness
Transmission electron microscopy
Substrates
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

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AB - ZnO films deposited on Si substrates by the sol-gel process were characterized by transmission electron microscopy and energy dispersive X-ray spectroscopy to investigate the effect of annealing temperature (550°C and 800°C) on their microstructures and compositions. When the ZnO film was annealed at a temperature of 800°C, excess Zn atoms was formed in the ZnO film due to the thermal decomposition of ZnO into Zn and O atoms, creating a Zn/ZnO composite film. It was proposed that the excess Zn atoms in the Zn/ZnO composite film may serve to improve the resistance to dislocation motion within the ZnO film, thus increasing the strength of the film. Nanoindentation tests confirmed that the high annealing temperature was beneficial to increase the hardness of the ZnO film.

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