Effect of excess Pb and O content on the ferroelectric properties of sputter deposited Pb(Zr0.52Ti0.48)O3/Pt system

Hyung-Ho Park, Il Sup Jin, Do Hyun Kim, Tae Song Kim

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Abstract

The effect of excess Pb and O content on the ferroelectric properties of Pb(Zr0.52Ti0.48)O3/Pt system has been investigated. PZT films were sputter-deposited from a target containing 50% excess Pb and O on a substrate heated at 520°C. This permitted the PZT films to be crystallized directly to a perovskite phase. The excess content of Pb and O in the sputter-deposited PZT films were controlled by successive furnace-annealing at 500°C by varying the annealing time. Polarization-switching field (P-E), current-applying electric field (I-E), and fatigue property measurements were done after rapid thermal annealing (RTA) of the films at 600 and 700°C. The 700°C-treated PZT film containing 26% of excess Pb before RTA showed better ferroelectric properties than the 600°C-treated film. On the contrary, a degradation of ferroelectric properties was observed with the 700°C-treated films containing 17 or 5% of excess Pb before RTA. These two opposed effects of high temperature-RTA treatment on the ferroelectric properties of the PZT films could be explained using a space charge model.

Original languageEnglish
Pages (from-to)300-304
Number of pages5
JournalThin Solid Films
Volume332
Issue number1-2
DOIs
Publication statusPublished - 1998 Nov 2

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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