Abstract
Lead zirconate titanate (PZT) (Zr/Ti = 40/60) thin films on Pt/SiO2/Si substrate with greatly different grain size were attained well with controlled atomic composition and crystalline orientation by varying the starting solution composition and annealing time. Small and large grained films with (1 1 1)-preferred orientation were obtained and their grain sizes were approximately 110 and 370 nm, respectively. Since annealing treatment induced the alternation of microstructure and stress at the interface, the effect of grain size was discussed in a standpoint of microstructural characteristic. Measurements of ferroelectric and electric properties revealed that small grained film presents more gradual polarization behavior, less degradation of polarization through switching cycles, and lower leakage current density than large grained film.
| Original language | English |
|---|---|
| Pages (from-to) | 544-548 |
| Number of pages | 5 |
| Journal | Applied Surface Science |
| Volume | 169-170 |
| DOIs | |
| Publication status | Published - 2001 Jan 15 |
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All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films
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Effect of grain size of Pb(Zr0.4Ti0.6)O3 sol-gel derived thin films on the ferroelectric properties. / Yang, Jun Kyu; Kim, Woo Sik; Park, Hyung-Ho.
In: Applied Surface Science, Vol. 169-170, 15.01.2001, p. 544-548.Research output: Contribution to journal › Article
TY - JOUR
T1 - Effect of grain size of Pb(Zr0.4Ti0.6)O3 sol-gel derived thin films on the ferroelectric properties
AU - Yang, Jun Kyu
AU - Kim, Woo Sik
AU - Park, Hyung-Ho
PY - 2001/1/15
Y1 - 2001/1/15
N2 - Lead zirconate titanate (PZT) (Zr/Ti = 40/60) thin films on Pt/SiO2/Si substrate with greatly different grain size were attained well with controlled atomic composition and crystalline orientation by varying the starting solution composition and annealing time. Small and large grained films with (1 1 1)-preferred orientation were obtained and their grain sizes were approximately 110 and 370 nm, respectively. Since annealing treatment induced the alternation of microstructure and stress at the interface, the effect of grain size was discussed in a standpoint of microstructural characteristic. Measurements of ferroelectric and electric properties revealed that small grained film presents more gradual polarization behavior, less degradation of polarization through switching cycles, and lower leakage current density than large grained film.
AB - Lead zirconate titanate (PZT) (Zr/Ti = 40/60) thin films on Pt/SiO2/Si substrate with greatly different grain size were attained well with controlled atomic composition and crystalline orientation by varying the starting solution composition and annealing time. Small and large grained films with (1 1 1)-preferred orientation were obtained and their grain sizes were approximately 110 and 370 nm, respectively. Since annealing treatment induced the alternation of microstructure and stress at the interface, the effect of grain size was discussed in a standpoint of microstructural characteristic. Measurements of ferroelectric and electric properties revealed that small grained film presents more gradual polarization behavior, less degradation of polarization through switching cycles, and lower leakage current density than large grained film.
UR - http://www.scopus.com/inward/record.url?scp=0035128342&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035128342&partnerID=8YFLogxK
U2 - 10.1016/S0169-4332(00)00718-2
DO - 10.1016/S0169-4332(00)00718-2
M3 - Article
AN - SCOPUS:0035128342
VL - 169-170
SP - 544
EP - 548
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -