Effect of grain size of Pb(Zr0.4Ti0.6)O3 sol-gel derived thin films on the ferroelectric properties

Jun Kyu Yang; Woo Sik Kim; Hyung Ho Park

doi:10.1016/S0169-4332(00)00718-2

Effect of grain size of Pb(Zr_0.4Ti_0.6)O₃ sol-gel derived thin films on the ferroelectric properties

Jun Kyu Yang, Woo Sik Kim, Hyung Ho Park

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

53 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT) (Zr/Ti = 40/60) thin films on Pt/SiO₂/Si substrate with greatly different grain size were attained well with controlled atomic composition and crystalline orientation by varying the starting solution composition and annealing time. Small and large grained films with (1 1 1)-preferred orientation were obtained and their grain sizes were approximately 110 and 370 nm, respectively. Since annealing treatment induced the alternation of microstructure and stress at the interface, the effect of grain size was discussed in a standpoint of microstructural characteristic. Measurements of ferroelectric and electric properties revealed that small grained film presents more gradual polarization behavior, less degradation of polarization through switching cycles, and lower leakage current density than large grained film.

Original language	English
Pages (from-to)	544-548
Number of pages	5
Journal	Applied Surface Science
Volume	169-170
DOIs	https://doi.org/10.1016/S0169-4332(00)00718-2
Publication status	Published - 2001 Jan 15

Bibliographical note

Funding Information:
The authors wish to acknowledge the financial support of Korea Research Foundation made in the program year of 1998.

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "Lead zirconate titanate (PZT) (Zr/Ti = 40/60) thin films on Pt/SiO2/Si substrate with greatly different grain size were attained well with controlled atomic composition and crystalline orientation by varying the starting solution composition and annealing time. Small and large grained films with (1 1 1)-preferred orientation were obtained and their grain sizes were approximately 110 and 370 nm, respectively. Since annealing treatment induced the alternation of microstructure and stress at the interface, the effect of grain size was discussed in a standpoint of microstructural characteristic. Measurements of ferroelectric and electric properties revealed that small grained film presents more gradual polarization behavior, less degradation of polarization through switching cycles, and lower leakage current density than large grained film.",

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AU - Yang, Jun Kyu

AU - Kim, Woo Sik

AU - Park, Hyung Ho

N1 - Funding Information: The authors wish to acknowledge the financial support of Korea Research Foundation made in the program year of 1998.

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AB - Lead zirconate titanate (PZT) (Zr/Ti = 40/60) thin films on Pt/SiO2/Si substrate with greatly different grain size were attained well with controlled atomic composition and crystalline orientation by varying the starting solution composition and annealing time. Small and large grained films with (1 1 1)-preferred orientation were obtained and their grain sizes were approximately 110 and 370 nm, respectively. Since annealing treatment induced the alternation of microstructure and stress at the interface, the effect of grain size was discussed in a standpoint of microstructural characteristic. Measurements of ferroelectric and electric properties revealed that small grained film presents more gradual polarization behavior, less degradation of polarization through switching cycles, and lower leakage current density than large grained film.

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