Effect of HAc and IPA addition in ozonated water cleaning system for ArF photoresist removal

Jonghyuck Lee, Kibyung Park, Sangwoo Lim

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

For the improvement of ArF photoresist removal performance, the effect of acetic acid (HAc) and isopropyl alcohol (IPA) in an ozonated water cleaning system was investigated by combining experimental and simulation results. The ArF photoresist removal rate increased by 6.8 times with an increase in HAc concentration in ozonated water vapor. With a higher ozone concentration, a lower hydroxyl radical (OḢ) concentration, and no reaction between photoresist by HAc observed, it is concluded that the improvement of the ArF photoresist removal rate with the addition of HAc results from a higher aqueous ozone concentration due to extended lifetime and a higher solubility of ozone due to the OḢ scavenging effect. The increase in IPA concentration in ozonated water vapor also improved the ArF photoresist removal rate by 12 times. Simulation results show that OḢ concentration was much lower than pure ozonated water, presumably due to a slower OḢ formation rate. ArF photoresist was removed at a relatively high speed in the vapor of IPA and water mixture even in the absence of aqueous ozone. Therefore, it is concluded that the improved photoresist removal rate with an IPA addition in ozonated water mainly results from the direct oxidation of photoresist by IPA itself.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume155
Issue number8
DOIs
Publication statusPublished - 2008 Jul 11

Fingerprint

isopropyl alcohol
2-Propanol
Photoresists
photoresists
cleaning
Cleaning
Alcohols
Water
Ozone
water
ozone
Steam
Water vapor
water vapor
Scavenging
scavenging
hydroxyl radicals
acetic acid
Acetic acid
Acetic Acid

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Materials Chemistry
  • Electrochemistry

Cite this

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abstract = "For the improvement of ArF photoresist removal performance, the effect of acetic acid (HAc) and isopropyl alcohol (IPA) in an ozonated water cleaning system was investigated by combining experimental and simulation results. The ArF photoresist removal rate increased by 6.8 times with an increase in HAc concentration in ozonated water vapor. With a higher ozone concentration, a lower hydroxyl radical (OḢ) concentration, and no reaction between photoresist by HAc observed, it is concluded that the improvement of the ArF photoresist removal rate with the addition of HAc results from a higher aqueous ozone concentration due to extended lifetime and a higher solubility of ozone due to the OḢ scavenging effect. The increase in IPA concentration in ozonated water vapor also improved the ArF photoresist removal rate by 12 times. Simulation results show that OḢ concentration was much lower than pure ozonated water, presumably due to a slower OḢ formation rate. ArF photoresist was removed at a relatively high speed in the vapor of IPA and water mixture even in the absence of aqueous ozone. Therefore, it is concluded that the improved photoresist removal rate with an IPA addition in ozonated water mainly results from the direct oxidation of photoresist by IPA itself.",
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Effect of HAc and IPA addition in ozonated water cleaning system for ArF photoresist removal. / Lee, Jonghyuck; Park, Kibyung; Lim, Sangwoo.

In: Journal of the Electrochemical Society, Vol. 155, No. 8, 11.07.2008.

Research output: Contribution to journalArticle

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AU - Lim, Sangwoo

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