Effect of heat treatment of diamond films on field emission property

J. Y. Shim; E. J. Chi; H. K. Baik; K. M. Song; S. M. Lee

Effect of heat treatment of diamond films on field emission property

J. Y. Shim, E. J. Chi, H. K. Baik, K. M. Song, S. M. Lee

Department of Materials Science and Engineering

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

We have investigated structural and electrical properties of the undoped diamond films prepared by hot filament CVD. It is found that after annealing the as-grown diamond films the resistivity increased significantly due to the dehydrogenation confirmed by FTIR. The field emission property of the as-grown diamond films degraded significantly after annealed in nitrogen ambient. The reason for the degradation is discussed by comparing hydrogen bonding with resistivity.

Original language	English
Pages	267-268
Number of pages	2
Publication status	Published - 1998
Event	Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC - Asheville, NC, USA Duration: 1998 Jul 19 → 1998 Jul 24

Other

Other	Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC
City	Asheville, NC, USA
Period	98/7/19 → 98/7/24

All Science Journal Classification (ASJC) codes

Surfaces and Interfaces

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@conference{fdeb5f430d9146f79b33de40478a2dd4,

title = "Effect of heat treatment of diamond films on field emission property",

abstract = "We have investigated structural and electrical properties of the undoped diamond films prepared by hot filament CVD. It is found that after annealing the as-grown diamond films the resistivity increased significantly due to the dehydrogenation confirmed by FTIR. The field emission property of the as-grown diamond films degraded significantly after annealed in nitrogen ambient. The reason for the degradation is discussed by comparing hydrogen bonding with resistivity.",

author = "Shim, {J. Y.} and Chi, {E. J.} and Baik, {H. K.} and Song, {K. M.} and Lee, {S. M.}",

year = "1998",

language = "English",

pages = "267--268",

note = "Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC ; Conference date: 19-07-1998 Through 24-07-1998",

}

TY - CONF

T1 - Effect of heat treatment of diamond films on field emission property

AU - Shim, J. Y.

AU - Chi, E. J.

AU - Baik, H. K.

AU - Song, K. M.

AU - Lee, S. M.

PY - 1998

Y1 - 1998

N2 - We have investigated structural and electrical properties of the undoped diamond films prepared by hot filament CVD. It is found that after annealing the as-grown diamond films the resistivity increased significantly due to the dehydrogenation confirmed by FTIR. The field emission property of the as-grown diamond films degraded significantly after annealed in nitrogen ambient. The reason for the degradation is discussed by comparing hydrogen bonding with resistivity.

AB - We have investigated structural and electrical properties of the undoped diamond films prepared by hot filament CVD. It is found that after annealing the as-grown diamond films the resistivity increased significantly due to the dehydrogenation confirmed by FTIR. The field emission property of the as-grown diamond films degraded significantly after annealed in nitrogen ambient. The reason for the degradation is discussed by comparing hydrogen bonding with resistivity.

UR - http://www.scopus.com/inward/record.url?scp=0032315680&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032315680&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0032315680

SP - 267

EP - 268

T2 - Proceedings of the 1998 11th International Vacuum Microelectronics Conference, IVMC

Y2 - 19 July 1998 through 24 July 1998

ER -

Effect of heat treatment of diamond films on field emission property

Abstract

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All Science Journal Classification (ASJC) codes

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