The effects of plasma nitridation conditions, including substrate temperature (room temperature or high temperature) and plasma source gas (N2 or NH3), on the energy band characteristics and the chemical states of ultrathin SiON films was studied by using reflection electron energy loss spectroscopy (REELS) and X-ray photoelectron spectroscopy (XPS). The depth profile of nitrogen incorporated in the SiON films as a function of the above conditions was examined using mediumenergy ion scattering (MEIS). The decrease in the band gap caused by nitridation was enhanced to a greater extent at high substrate temperature and by using a N2 plasma. The profile for N incorporation indicated that the change in band gap was directly related to the quantity of N in the SiON film. These characteristics are strongly related to the chemical state of the occupied N 2p state in SiON.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)