Effect of initial Al contamination on ultrathin gate oxides

Sang Woo Lim, Francisco Machuca, Hongmei Liao, Ronald P. Chiarello, Robert C. Helms

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of initial Al contamination on ultrathin gate oxides'. Together they form a unique fingerprint.

Engineering

Chemistry

Earth and Planetary Sciences

Physics

Material Science