Effect of isopropyl alcohol addition in ozonated water on the corrosion of tungsten film

Younghwan Lee, June Young Lee, Kyung Tae Im, Sangwoo Lim

Research output: Contribution to journalArticle

Abstract

Acetic acid (HAc) or 2-propanol (IPA) was added to ozonated water vapor, and its ability to clean corroded Al and W surfaces was studied. No changes to the surface morphology or film thickness were observed on any of the Al films to which the ozonated water vapor cleaning process was applied, either with or without the addition of HAc and IPA. No change in the W surface was observed when it was exposed to either pure ozonated water vapor or that which had HAc-added. However, the surface morphology of the W film changed, and its thickness decreased, when it was exposed to the ozonated water vapor with added IPA. It was also noted that no corrosion occurred on the surface of W when only IPA and the water mixture vapor were injected. Given that the pH of the water with added IPA was unchanged, regardless of whether ozone feeding had occurred, it can be concluded that the main reason for the corrosion of the W film is the accelerated oxidation of W. This accelerated oxidation is a byproduct of ozone decomposition in the presence of a radical promoter, rather than the enhanced dissolution of oxidized W.

Original languageEnglish
Pages (from-to)565111-565115
Number of pages5
JournalJapanese journal of applied physics
Volume48
Issue number5
DOIs
Publication statusPublished - 2009 May 1

Fingerprint

isopropyl alcohol
Water vapor
Tungsten
corrosion
tungsten
Alcohols
water vapor
Corrosion
Ozone
water
Surface morphology
Water
ozone
Oxidation
Propanol
oxidation
Acetic acid
Byproducts
Film thickness
Cleaning

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Lee, Younghwan ; Lee, June Young ; Im, Kyung Tae ; Lim, Sangwoo. / Effect of isopropyl alcohol addition in ozonated water on the corrosion of tungsten film. In: Japanese journal of applied physics. 2009 ; Vol. 48, No. 5. pp. 565111-565115.
@article{507772988e3046ae9316ffa112006705,
title = "Effect of isopropyl alcohol addition in ozonated water on the corrosion of tungsten film",
abstract = "Acetic acid (HAc) or 2-propanol (IPA) was added to ozonated water vapor, and its ability to clean corroded Al and W surfaces was studied. No changes to the surface morphology or film thickness were observed on any of the Al films to which the ozonated water vapor cleaning process was applied, either with or without the addition of HAc and IPA. No change in the W surface was observed when it was exposed to either pure ozonated water vapor or that which had HAc-added. However, the surface morphology of the W film changed, and its thickness decreased, when it was exposed to the ozonated water vapor with added IPA. It was also noted that no corrosion occurred on the surface of W when only IPA and the water mixture vapor were injected. Given that the pH of the water with added IPA was unchanged, regardless of whether ozone feeding had occurred, it can be concluded that the main reason for the corrosion of the W film is the accelerated oxidation of W. This accelerated oxidation is a byproduct of ozone decomposition in the presence of a radical promoter, rather than the enhanced dissolution of oxidized W.",
author = "Younghwan Lee and Lee, {June Young} and Im, {Kyung Tae} and Sangwoo Lim",
year = "2009",
month = "5",
day = "1",
doi = "10.1143/JJAP.48.056511",
language = "English",
volume = "48",
pages = "565111--565115",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "5",

}

Effect of isopropyl alcohol addition in ozonated water on the corrosion of tungsten film. / Lee, Younghwan; Lee, June Young; Im, Kyung Tae; Lim, Sangwoo.

In: Japanese journal of applied physics, Vol. 48, No. 5, 01.05.2009, p. 565111-565115.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Effect of isopropyl alcohol addition in ozonated water on the corrosion of tungsten film

AU - Lee, Younghwan

AU - Lee, June Young

AU - Im, Kyung Tae

AU - Lim, Sangwoo

PY - 2009/5/1

Y1 - 2009/5/1

N2 - Acetic acid (HAc) or 2-propanol (IPA) was added to ozonated water vapor, and its ability to clean corroded Al and W surfaces was studied. No changes to the surface morphology or film thickness were observed on any of the Al films to which the ozonated water vapor cleaning process was applied, either with or without the addition of HAc and IPA. No change in the W surface was observed when it was exposed to either pure ozonated water vapor or that which had HAc-added. However, the surface morphology of the W film changed, and its thickness decreased, when it was exposed to the ozonated water vapor with added IPA. It was also noted that no corrosion occurred on the surface of W when only IPA and the water mixture vapor were injected. Given that the pH of the water with added IPA was unchanged, regardless of whether ozone feeding had occurred, it can be concluded that the main reason for the corrosion of the W film is the accelerated oxidation of W. This accelerated oxidation is a byproduct of ozone decomposition in the presence of a radical promoter, rather than the enhanced dissolution of oxidized W.

AB - Acetic acid (HAc) or 2-propanol (IPA) was added to ozonated water vapor, and its ability to clean corroded Al and W surfaces was studied. No changes to the surface morphology or film thickness were observed on any of the Al films to which the ozonated water vapor cleaning process was applied, either with or without the addition of HAc and IPA. No change in the W surface was observed when it was exposed to either pure ozonated water vapor or that which had HAc-added. However, the surface morphology of the W film changed, and its thickness decreased, when it was exposed to the ozonated water vapor with added IPA. It was also noted that no corrosion occurred on the surface of W when only IPA and the water mixture vapor were injected. Given that the pH of the water with added IPA was unchanged, regardless of whether ozone feeding had occurred, it can be concluded that the main reason for the corrosion of the W film is the accelerated oxidation of W. This accelerated oxidation is a byproduct of ozone decomposition in the presence of a radical promoter, rather than the enhanced dissolution of oxidized W.

UR - http://www.scopus.com/inward/record.url?scp=68349096372&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=68349096372&partnerID=8YFLogxK

U2 - 10.1143/JJAP.48.056511

DO - 10.1143/JJAP.48.056511

M3 - Article

AN - SCOPUS:68349096372

VL - 48

SP - 565111

EP - 565115

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 5

ER -