Effect of negatively charged species on the growth behavior of silicon films in hot wire chemical vapor deposition

Jean Ho Song, Sang Hoon Pak, Nong Moon Hwang, Heon Je Kim

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
JournalThin Solid Films
Volume516
Issue number15
Publication statusPublished - 2008

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