Effect of O2 plasma treatment on the properties of SiO2 aerogel film

Hong Ryul Kim, Hyung Ho Park, Sang Hoon Hyun, Geun Young Yeom

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

In the down-scaling trend of ultra large scaled integration, SiO2 aerogel film can be a promising material for intermetal dielectric with inherent low dielectric constant. A TEOS-derived SiO2 aerogel film by spin-coating and supercritical drying has high porosity and large internal surface area which contains the chemical species on the internal surface, such as organic groups, hydroxyl groups, and adsorbed water. An oxygen plasma treatment of SiO2 aerogel film was introduced to control the internal surface chemical species for applying to intermetal dielectrics. The chemical bonding state of the internal surface, microstructure, and electrical properties of the oxygen plasma treated SiO2 aerogel film were analyzed. Through the oxygen plasma treatment, the surface chemical groups were effectively eliminated. Also, with the parameter changes of oxygen plasma treatment such as ICP power and bias voltage, micro-structural evolution occurred. Decreases in thickness and particle growth were observed. And the improvement of leakage current behavior was also observed after oxygen plasma treatment.

Original languageEnglish
Pages (from-to)444-448
Number of pages5
JournalThin Solid Films
Volume332
Issue number1-2
DOIs
Publication statusPublished - 1998 Nov 2

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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