Effect of solvent on the preparation of ambient pressure-dried SiO2 aerogel films

Sang Bae Jung, Jung Ho Kim, Hong Ryul Kim, Hyung Ho Park

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

SiO2 aerogel film has a promising property as intermetal dielectrics (IMD) for its low dielectric constant. However, a stable and porous SiO2 aerogel film was not properly synthesized due to the rapid evaporation of solvent during spin coating even in a solvent saturated atmosphere. So less evaporative solvent, 2-methoxyethanol (2MeEtOH), was introduced and the properties of film were compared with films using conventional solvent, ethanol (EtOH). It was found that gelation was faster with 2MeEtOH than EtOH. Highly porous and three-dimensionally well microstructured SiO2 aerogel film could be fabricated with 2MeEtOH. The maximum porosity of the films using 2MeEtOH and EtOH was 85 and 71%, respectively. The amount of residual -OR, and -OH groups was smaller in the former. The compositional ratios of Si:O:C in the films were 1:2.1:0.2 for the former and 1:2.4:1.1 for the latter. And corresponded dielectric constants were 1.6 and 2.2, respectively.

Original languageEnglish
Pages (from-to)113-122
Number of pages10
JournalMicroelectronic Engineering
Volume65
Issue number1-2
DOIs
Publication statusPublished - 2002 Dec

Bibliographical note

Funding Information:
The authors wish to acknowledge the financial support of Brain Korea 21 project.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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