Effect of SrTiO3 buffer layer on the phase formation and properties of direct-patternable BiFeO3 thin films fabricated using photochemical metal-organic deposition

Hong Sub Lee, Hye Jung Choi, Sung Woong Chung, Hyung Ho Park

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1 Citation (Scopus)

Abstract

The formation of BiFeO3 without impurity phases, such as excess bismuth and iron, has been possible in only a narrow pressuretemperature- stoichiometric window. A direct-patterned BiFeO3 film using photochemical metal-organic deposition (PMOD) was fabricated without a conventional etching. BiFeO3 film was formed on a SrTiO3 buffer layer with a perovskite structure and a lattice constant of 3.905α in order to study the substrate effect during phase formation. This study showed the phase formation and electrical properties of the direct-patternable PMOD BiFeO3 thin films. The SrTiO3 buffer layer was found to somewhat prevent the formation of a Fe excess phase in BiFeO3 after anneal at 550°C for 20min under O2 and N2 atmospheres. The measured remnant polarization (Pr) and coercive field (Ec) values of the Pt/BiFeO3(200 nm)/SrTiO3(40 nm)/Pt/Si structure were 10 μC/cm2 and 300kV/cm, respectively. Leakage current of perovskite BiFeO3 film was found to be dominated by PooleFrenkel emission as other perovskite ferroelectrics. To obtain an image, a spin-coated BiFeO3 film was exposed to UV for 15min and then rinsed in hexane. From this work, it was revealed that the direct-patterning of BiFeO3 films could be applicable for the fabrication of micro-patterned systems using a SrTiO3 buffer layer with controlled reactant stoichiometry.

Original languageEnglish
Pages (from-to)1024-1027
Number of pages4
JournalJournal of the Ceramic Society of Japan
Volume118
Issue number1383
DOIs
Publication statusPublished - 2010 Nov

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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