Effect of the acceleration energy of hydrogen ion irradiation on perpendicular magnetic anisotropy in coox/PD multilayer films

Magnetic stripes were achieved from hydrogen-ion-irradiated areas separated by the nonirradiated areas masked by UV-imprinted polymeric patterns. A perpendicular magnetic anistropy with a squareness of 0.96 and a coercivity of 2 kOe in (CoOx /Pd)10 multilayer films was induced via deoxidization, which heavily depended on the acceleration energy of hydrogen ion irradiation in the range of 400 eV. These phenomena were demonstrated via deoxidization of cobalt oxide to pure cobalt as observed by X-ray diffraction, accompanying the formation of a CoPd(111) phase indicating perpendicular magnetic anisotropy due to the preferential removal or reduction of oxygen atoms in multilayer films.