Effect of the angle accuracy in reduced-phase dual-illumination interferometer

Behnam Tayebi; Mohammad Reza Jafar Fard; Farnaz Sharif; Dug Young Kim

doi:10.1117/12.2074457

Effect of the angle accuracy in reduced-phase dual-illumination interferometer

Behnam Tayebi, Mohammad Reza Jafar Fard, Farnaz Sharif, Dug Young Kim

Department of Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

Reduced-phase dual-illumination interferometer (RPDII) is an off axis, single shot and single wavelength phase imaging technique to measure large objects without using unwrapping algorithms. Two beams of this interferometer illuminate a sample at different incident angles, two phases of the different incident angles and their phase difference are recorded. The phase difference between two beams can be controlled by adjusting the incident angles. The angle accuracy that decrease the RPDII accuracy have been studied. We have shown, the groove spacing of the grating and magnification of the lens system before sample, determine the incident angle accuracy. The ability of RPDII to unwrap large phases is shown by reconstructing phase of a step object without using unwrapping algorithms. The reconstructed image shows that the total inaccuracy is much more than the inaccuracy caused by incident angles.

Original language	English
Title of host publication	Holography, Diffractive Optics, and Applications VI
Editors	Yunlong Sheng, Changhe Zhou, Chongxiu Yu
Publisher	SPIE
ISBN (Electronic)	9781628413441
DOIs	https://doi.org/10.1117/12.2074457
Publication status	Published - 2014
Event	Holography, Diffractive Optics, and Applications VI - Beijing, China Duration: 2014 Oct 9 → 2014 Oct 11

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9271
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	Holography, Diffractive Optics, and Applications VI
Country/Territory	China
City	Beijing
Period	14/10/9 → 14/10/11

Bibliographical note

Publisher Copyright:
© 2014 SPIE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.2074457

Cite this

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title = "Effect of the angle accuracy in reduced-phase dual-illumination interferometer",

abstract = "Reduced-phase dual-illumination interferometer (RPDII) is an off axis, single shot and single wavelength phase imaging technique to measure large objects without using unwrapping algorithms. Two beams of this interferometer illuminate a sample at different incident angles, two phases of the different incident angles and their phase difference are recorded. The phase difference between two beams can be controlled by adjusting the incident angles. The angle accuracy that decrease the RPDII accuracy have been studied. We have shown, the groove spacing of the grating and magnification of the lens system before sample, determine the incident angle accuracy. The ability of RPDII to unwrap large phases is shown by reconstructing phase of a step object without using unwrapping algorithms. The reconstructed image shows that the total inaccuracy is much more than the inaccuracy caused by incident angles.",

author = "Behnam Tayebi and Fard, {Mohammad Reza Jafar} and Farnaz Sharif and Kim, {Dug Young}",

note = "Publisher Copyright: {\textcopyright} 2014 SPIE.; Holography, Diffractive Optics, and Applications VI ; Conference date: 09-10-2014 Through 11-10-2014",

year = "2014",

doi = "10.1117/12.2074457",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

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Tayebi, B, Fard, MRJ, Sharif, F & Kim, DY 2014, Effect of the angle accuracy in reduced-phase dual-illumination interferometer. in Y Sheng, C Zhou & C Yu (eds), Holography, Diffractive Optics, and Applications VI., 92711V, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9271, SPIE, Holography, Diffractive Optics, and Applications VI, Beijing, China, 14/10/9. https://doi.org/10.1117/12.2074457

Effect of the angle accuracy in reduced-phase dual-illumination interferometer. / Tayebi, Behnam; Fard, Mohammad Reza Jafar; Sharif, Farnaz et al.

Holography, Diffractive Optics, and Applications VI. ed. / Yunlong Sheng; Changhe Zhou; Chongxiu Yu. SPIE, 2014. 92711V (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9271).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Tayebi, Behnam

AU - Fard, Mohammad Reza Jafar

AU - Sharif, Farnaz

AU - Kim, Dug Young

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N2 - Reduced-phase dual-illumination interferometer (RPDII) is an off axis, single shot and single wavelength phase imaging technique to measure large objects without using unwrapping algorithms. Two beams of this interferometer illuminate a sample at different incident angles, two phases of the different incident angles and their phase difference are recorded. The phase difference between two beams can be controlled by adjusting the incident angles. The angle accuracy that decrease the RPDII accuracy have been studied. We have shown, the groove spacing of the grating and magnification of the lens system before sample, determine the incident angle accuracy. The ability of RPDII to unwrap large phases is shown by reconstructing phase of a step object without using unwrapping algorithms. The reconstructed image shows that the total inaccuracy is much more than the inaccuracy caused by incident angles.

AB - Reduced-phase dual-illumination interferometer (RPDII) is an off axis, single shot and single wavelength phase imaging technique to measure large objects without using unwrapping algorithms. Two beams of this interferometer illuminate a sample at different incident angles, two phases of the different incident angles and their phase difference are recorded. The phase difference between two beams can be controlled by adjusting the incident angles. The angle accuracy that decrease the RPDII accuracy have been studied. We have shown, the groove spacing of the grating and magnification of the lens system before sample, determine the incident angle accuracy. The ability of RPDII to unwrap large phases is shown by reconstructing phase of a step object without using unwrapping algorithms. The reconstructed image shows that the total inaccuracy is much more than the inaccuracy caused by incident angles.

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Effect of the angle accuracy in reduced-phase dual-illumination interferometer

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