Effect of the hydration on the properties of an aluminum oxide film

Jin Hyung Jun; Hyo June Kim; Doo Jin Choi

Effect of the hydration on the properties of an aluminum oxide film

Jin Hyung Jun, Hyo June Kim, Doo Jin Choi

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

The properties of Al₂O₃ films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al₂O₃ film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al ₂O₃ layer can be raised easily through a simple treatment.

Original language	English
Pages (from-to)	75-78
Number of pages	4
Journal	Journal of Ceramic Processing Research
Volume	9
Issue number	1
Publication status	Published - 2008

All Science Journal Classification (ASJC) codes

Ceramics and Composites

Cite this

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abstract = "The properties of Al2O3 films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al2O3 film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al 2O3 layer can be raised easily through a simple treatment.",

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AB - The properties of Al2O3 films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al2O3 film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al 2O3 layer can be raised easily through a simple treatment.

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Effect of the hydration on the properties of an aluminum oxide film

Abstract

All Science Journal Classification (ASJC) codes

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