Effect of the hydration on the properties of an aluminum oxide film

Jin Hyung Jun; Hyo June Kim; Doo Jin Choi

Effect of the hydration on the properties of an aluminum oxide film

Jin Hyung Jun, Hyo June Kim, Doo Jin Choi

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

The properties of Al₂O₃ films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al₂O₃ film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al ₂O₃ layer can be raised easily through a simple treatment.

Original language	English
Pages (from-to)	75-78
Number of pages	4
Journal	Journal of Ceramic Processing Research
Volume	9
Issue number	1
Publication status	Published - 2008

All Science Journal Classification (ASJC) codes

Ceramics and Composites

Fingerprint Dive into the research topics of 'Effect of the hydration on the properties of an aluminum oxide film'. Together they form a unique fingerprint.

Cite this

@article{ed5ca51f9cbe437c843fc8a44d9e3906,

title = "Effect of the hydration on the properties of an aluminum oxide film",

abstract = "The properties of Al2O3 films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al2O3 film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al 2O3 layer can be raised easily through a simple treatment.",

author = "Jun, {Jin Hyung} and Kim, {Hyo June} and Choi, {Doo Jin}",

year = "2008",

language = "English",

volume = "9",

pages = "75--78",

journal = "Journal of Ceramic Processing Research",

issn = "1229-9162",

publisher = "Hanyang University",

number = "1",

}

TY - JOUR

T1 - Effect of the hydration on the properties of an aluminum oxide film

AU - Jun, Jin Hyung

AU - Kim, Hyo June

AU - Choi, Doo Jin

PY - 2008

Y1 - 2008

N2 - The properties of Al2O3 films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al2O3 film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al 2O3 layer can be raised easily through a simple treatment.

AB - The properties of Al2O3 films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al2O3 film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al 2O3 layer can be raised easily through a simple treatment.

UR - http://www.scopus.com/inward/record.url?scp=41349083546&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=41349083546&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:41349083546

VL - 9

SP - 75

EP - 78

JO - Journal of Ceramic Processing Research

JF - Journal of Ceramic Processing Research

SN - 1229-9162

IS - 1

ER -

Effect of the hydration on the properties of an aluminum oxide film

Abstract

All Science Journal Classification (ASJC) codes

Other files and links

Cite this