Effect of the hydration on the properties of an aluminum oxide film

Jin Hyung Jun, Hyo June Kim, Doo Jin Choi

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The properties of Al2O3 films were investigated after dipping the films in DI-water. The thickness of the films did not change due to formation of Al-hydroride layer on their surfaces. After dipping in DI-water, the dielectric constant of the Al2O3 film increased and this seems to be caused by a structural change of the film surface. Using this phenomenon, the overall dielectric constant which includes an Al 2O3 layer can be raised easily through a simple treatment.

Original languageEnglish
Pages (from-to)75-78
Number of pages4
JournalJournal of Ceramic Processing Research
Volume9
Issue number1
Publication statusPublished - 2008

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites

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