Effect of thickness on the microwave dielectric properties of (Mg 0.93Ca0.07)Tio3 thin films

Byoung Duk Lee, Hong Ryul Lee, Ki Hyun Yoon, Yong Soo Cho

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The effect of thickness on microwave dielectric properties of the (Mg 0.93Ca0.07)TiO3 (MCT) thin films prepared by the metalorganic solution deposition technique were investigated. It could be obtained a well-crystallized MCT thin films annealed at lower temperature of 800°C compared with the bulk ceramics. As the thickness of MCT films increased up to 2 μm, the dielectric constants of MCT films were found to increase from 21 to 30 due to the reduction of interfacial dead layers effect with low dielectric constant at both electrodes. Also, the dielectric losses of MCT films tended to decrease to 0.0004 ± 0.0001 with increasing the thickness up to 2 μm due to the reduced stresses. But, the temperature coefficients of dielectric constant (TCK) of MCT films measured at 6 GHz were about +10ppm/°C independent of thickness.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume43
Issue number4 B
Publication statusPublished - 2004 Apr 15

Fingerprint

Dielectric properties
dielectric properties
Microwaves
microwaves
Thin films
Permittivity
permittivity
thin films
Dielectric losses
dielectric loss
ceramics
Temperature
Electrodes
electrodes
coefficients
temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

@article{3acc18749044418a83ed64a27786d909,
title = "Effect of thickness on the microwave dielectric properties of (Mg 0.93Ca0.07)Tio3 thin films",
abstract = "The effect of thickness on microwave dielectric properties of the (Mg 0.93Ca0.07)TiO3 (MCT) thin films prepared by the metalorganic solution deposition technique were investigated. It could be obtained a well-crystallized MCT thin films annealed at lower temperature of 800°C compared with the bulk ceramics. As the thickness of MCT films increased up to 2 μm, the dielectric constants of MCT films were found to increase from 21 to 30 due to the reduction of interfacial dead layers effect with low dielectric constant at both electrodes. Also, the dielectric losses of MCT films tended to decrease to 0.0004 ± 0.0001 with increasing the thickness up to 2 μm due to the reduced stresses. But, the temperature coefficients of dielectric constant (TCK) of MCT films measured at 6 GHz were about +10ppm/°C independent of thickness.",
author = "Lee, {Byoung Duk} and Lee, {Hong Ryul} and Yoon, {Ki Hyun} and Cho, {Yong Soo}",
year = "2004",
month = "4",
day = "15",
language = "English",
volume = "43",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "4 B",

}

Effect of thickness on the microwave dielectric properties of (Mg 0.93Ca0.07)Tio3 thin films. / Lee, Byoung Duk; Lee, Hong Ryul; Yoon, Ki Hyun; Cho, Yong Soo.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 43, No. 4 B, 15.04.2004.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Effect of thickness on the microwave dielectric properties of (Mg 0.93Ca0.07)Tio3 thin films

AU - Lee, Byoung Duk

AU - Lee, Hong Ryul

AU - Yoon, Ki Hyun

AU - Cho, Yong Soo

PY - 2004/4/15

Y1 - 2004/4/15

N2 - The effect of thickness on microwave dielectric properties of the (Mg 0.93Ca0.07)TiO3 (MCT) thin films prepared by the metalorganic solution deposition technique were investigated. It could be obtained a well-crystallized MCT thin films annealed at lower temperature of 800°C compared with the bulk ceramics. As the thickness of MCT films increased up to 2 μm, the dielectric constants of MCT films were found to increase from 21 to 30 due to the reduction of interfacial dead layers effect with low dielectric constant at both electrodes. Also, the dielectric losses of MCT films tended to decrease to 0.0004 ± 0.0001 with increasing the thickness up to 2 μm due to the reduced stresses. But, the temperature coefficients of dielectric constant (TCK) of MCT films measured at 6 GHz were about +10ppm/°C independent of thickness.

AB - The effect of thickness on microwave dielectric properties of the (Mg 0.93Ca0.07)TiO3 (MCT) thin films prepared by the metalorganic solution deposition technique were investigated. It could be obtained a well-crystallized MCT thin films annealed at lower temperature of 800°C compared with the bulk ceramics. As the thickness of MCT films increased up to 2 μm, the dielectric constants of MCT films were found to increase from 21 to 30 due to the reduction of interfacial dead layers effect with low dielectric constant at both electrodes. Also, the dielectric losses of MCT films tended to decrease to 0.0004 ± 0.0001 with increasing the thickness up to 2 μm due to the reduced stresses. But, the temperature coefficients of dielectric constant (TCK) of MCT films measured at 6 GHz were about +10ppm/°C independent of thickness.

UR - http://www.scopus.com/inward/record.url?scp=3042715639&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3042715639&partnerID=8YFLogxK

M3 - Article

VL - 43

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 4 B

ER -