Effective heat conservation in a sandwich-structured microbolometer using mesoporous TiO2 layers

Sun Gyu Choi; Tae Jung Ha; Hyung Ho Park; Sangwoo Shin; Hyung Hee Cho; Kwang Ho Kwon; Mun Pyo Hong

doi:10.1016/j.sna.2009.08.008

Effective heat conservation in a sandwich-structured microbolometer using mesoporous TiO₂ layers

Sun Gyu Choi, Tae Jung Ha, Hyung Ho Park, Sangwoo Shin, Hyung Hee Cho, Kwang Ho Kwon, Mun Pyo Hong

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The heat loss of the a-Si:H resistor layer in a microbolometer might be reduced by using ordered mesoporous TiO₂ thin films as thermal insulation layers. Infrared absorption of mesoporous TiO₂ thin films in the 833-1250 cm^-1 wave number region was measured using a Fourier transform infrared spectrometer. Also, the infrared absorption rates of upper and lower mesoporous TiO₂ films inserted into the microbolometer were calculated to be above 84% in the 8-12 μm wavelength region. The CFD-ACE thermal simulation program was used to evaluate the thermal isolation effectiveness of mesoporous TiO₂ films on the a-Si:H layer; the inclusion of this film on the a-Si:H layer improved heat conservation. A mesoporous TiO₂ thin film effectively reduced the thermal loss from a-Si:H resistor surface and drastically increased the temperature of the resistor film.

Original language	English
Pages (from-to)	131-135
Number of pages	5
Journal	Sensors and Actuators, A: Physical
Volume	155
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2009.08.008
Publication status	Published - 2009 Oct

Bibliographical note

Funding Information:
This work was supported by the IT R&D program of MKE/IITA [2009-F-018-01, TFT backplane technology for next generation display].

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/j.sna.2009.08.008

Cite this

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title = "Effective heat conservation in a sandwich-structured microbolometer using mesoporous TiO2 layers",

abstract = "The heat loss of the a-Si:H resistor layer in a microbolometer might be reduced by using ordered mesoporous TiO2 thin films as thermal insulation layers. Infrared absorption of mesoporous TiO2 thin films in the 833-1250 cm-1 wave number region was measured using a Fourier transform infrared spectrometer. Also, the infrared absorption rates of upper and lower mesoporous TiO2 films inserted into the microbolometer were calculated to be above 84% in the 8-12 μm wavelength region. The CFD-ACE thermal simulation program was used to evaluate the thermal isolation effectiveness of mesoporous TiO2 films on the a-Si:H layer; the inclusion of this film on the a-Si:H layer improved heat conservation. A mesoporous TiO2 thin film effectively reduced the thermal loss from a-Si:H resistor surface and drastically increased the temperature of the resistor film.",

author = "Choi, {Sun Gyu} and Ha, {Tae Jung} and Park, {Hyung Ho} and Sangwoo Shin and Cho, {Hyung Hee} and Kwon, {Kwang Ho} and Hong, {Mun Pyo}",

note = "Funding Information: This work was supported by the IT R&D program of MKE/IITA [2009-F-018-01, TFT backplane technology for next generation display]. ",

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AU - Choi, Sun Gyu

AU - Ha, Tae Jung

AU - Park, Hyung Ho

AU - Shin, Sangwoo

AU - Cho, Hyung Hee

AU - Kwon, Kwang Ho

AU - Hong, Mun Pyo

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AB - The heat loss of the a-Si:H resistor layer in a microbolometer might be reduced by using ordered mesoporous TiO2 thin films as thermal insulation layers. Infrared absorption of mesoporous TiO2 thin films in the 833-1250 cm-1 wave number region was measured using a Fourier transform infrared spectrometer. Also, the infrared absorption rates of upper and lower mesoporous TiO2 films inserted into the microbolometer were calculated to be above 84% in the 8-12 μm wavelength region. The CFD-ACE thermal simulation program was used to evaluate the thermal isolation effectiveness of mesoporous TiO2 films on the a-Si:H layer; the inclusion of this film on the a-Si:H layer improved heat conservation. A mesoporous TiO2 thin film effectively reduced the thermal loss from a-Si:H resistor surface and drastically increased the temperature of the resistor film.

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