Effective modulation of Ni silicide schottky barrier height using chlorine ion implantation and segregation

Wei Yip Loh, Hasnaa Etienne, Brian Coss, Injo Ok, Dean Turnbaugh, Yohann Spiegel, Frank Torregrosa, Joel Banti, Laurent Roux, Pui Yee Hung, Jungwoo Oh, Barry Sassman, Kelly Radar, Prashant Majhi, Hsing Huang Tseng, Rajarao Jammy

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13 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds