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Dive into the research topics of 'Effects of Ar Addition to O2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films'. Together they form a unique fingerprint.- Sort by
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Hanearl Jung, Il Kwon Oh, Chang Mo Yoon, Bo Eun Park, Sanghun Lee, Ohyung Kwon, Woo Jae Lee, Se Hun Kwon, Woo Hee Kim, Hyungjun Kim
Research output: Contribution to journal › Article › peer-review