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Effects of Ar Addition to O2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films
Hanearl Jung, Il Kwon Oh, Chang Mo Yoon, Bo Eun Park, Sanghun Lee, Ohyung Kwon, Woo Jae Lee, Se Hun Kwon, Woo Hee Kim, Hyungjun Kim
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)