Effects of Ar Addition to O2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films

Hanearl Jung, Il Kwon Oh, Chang Mo Yoon, Bo Eun Park, Sanghun Lee, Ohyung Kwon, Woo Jae Lee, Se Hun Kwon, Woo Hee Kim, Hyungjun Kim

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6 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds