Effects of BF+2 implantation on the strain-relaxation of pseudomorphic metastable Ge0.06Si0.94 alloy layers

M. S. Oh, M. H. Joo, S. Im, H. B. Kim, H. K. Kim, J. H. Song

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Effects of BF<sup>+</sup><sub>2</sub> implantation on the strain-relaxation of pseudomorphic metastable Ge<sub>0.06</sub>Si<sub>0.94</sub> alloy layers'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy