Effects of ceric ammonium nitrate (CAN) additive in HNO3 solution on the electrochemical behaviour of ruthenium for CMP processes

W. J. Lee, H. S. Park, S. I. Lee, H. C. Sohn

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

In order to develop a new chemical mechanical polishing process for ruthenium (Ru), the present work deals with the effect of a ceric ammonium nitrate (CAN) additive on the electrochemical behaviour of physical vapour deposited Ru films in a l M HNO3 solution employing electrochemical methods and surface analytical techniques. By adding CAN to HNO3 solution, the polarisation curves showed an increase in the corrosion potential and current, suggesting that Ru is anodically polarised by CAN as an oxidising additive. To characterise the influence of CAN, open-circuit potential (OCP) and potentiostatic anodic current transient curves were examined in CAN-containing HNO3 solution and the resulting surfaces were then characterised by scanning electron microscopy and X-ray photoelectron spectroscopy. It is proposed that Ru is oxidised to heterogeneous Ru 2O3 and RuO2 films on the Ru surface in CAN-containing HNO3 solution and galvanic corrosion occurs at grain boundaries, caused by the difference in OCP between the grain interiors and boundaries. The grain boundaries are oxidised to RuO4, a volatile species, resulting in a roughened and porous structure.

Original languageEnglish
Pages (from-to)119-125
Number of pages7
JournalJournal of Applied Electrochemistry
Volume34
Issue number1
DOIs
Publication statusPublished - 2004 Jan 1

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Cytidine Monophosphate
Ruthenium
Nitrates
Grain boundaries
Corrosion
Chemical mechanical polishing
Networks (circuits)
ceric ammonium nitrate
X ray photoelectron spectroscopy
Vapors
Polarization
Scanning electron microscopy

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)
  • Electrochemistry
  • Materials Chemistry

Cite this

@article{d94c734065ac47e2a3ec471be7f15088,
title = "Effects of ceric ammonium nitrate (CAN) additive in HNO3 solution on the electrochemical behaviour of ruthenium for CMP processes",
abstract = "In order to develop a new chemical mechanical polishing process for ruthenium (Ru), the present work deals with the effect of a ceric ammonium nitrate (CAN) additive on the electrochemical behaviour of physical vapour deposited Ru films in a l M HNO3 solution employing electrochemical methods and surface analytical techniques. By adding CAN to HNO3 solution, the polarisation curves showed an increase in the corrosion potential and current, suggesting that Ru is anodically polarised by CAN as an oxidising additive. To characterise the influence of CAN, open-circuit potential (OCP) and potentiostatic anodic current transient curves were examined in CAN-containing HNO3 solution and the resulting surfaces were then characterised by scanning electron microscopy and X-ray photoelectron spectroscopy. It is proposed that Ru is oxidised to heterogeneous Ru 2O3 and RuO2 films on the Ru surface in CAN-containing HNO3 solution and galvanic corrosion occurs at grain boundaries, caused by the difference in OCP between the grain interiors and boundaries. The grain boundaries are oxidised to RuO4, a volatile species, resulting in a roughened and porous structure.",
author = "Lee, {W. J.} and Park, {H. S.} and Lee, {S. I.} and Sohn, {H. C.}",
year = "2004",
month = "1",
day = "1",
doi = "10.1023/B:JACH.0000005621.59716.39",
language = "English",
volume = "34",
pages = "119--125",
journal = "Journal of Applied Electrochemistry",
issn = "0021-891X",
publisher = "Springer Netherlands",
number = "1",

}

Effects of ceric ammonium nitrate (CAN) additive in HNO3 solution on the electrochemical behaviour of ruthenium for CMP processes. / Lee, W. J.; Park, H. S.; Lee, S. I.; Sohn, H. C.

In: Journal of Applied Electrochemistry, Vol. 34, No. 1, 01.01.2004, p. 119-125.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Effects of ceric ammonium nitrate (CAN) additive in HNO3 solution on the electrochemical behaviour of ruthenium for CMP processes

AU - Lee, W. J.

AU - Park, H. S.

AU - Lee, S. I.

AU - Sohn, H. C.

PY - 2004/1/1

Y1 - 2004/1/1

N2 - In order to develop a new chemical mechanical polishing process for ruthenium (Ru), the present work deals with the effect of a ceric ammonium nitrate (CAN) additive on the electrochemical behaviour of physical vapour deposited Ru films in a l M HNO3 solution employing electrochemical methods and surface analytical techniques. By adding CAN to HNO3 solution, the polarisation curves showed an increase in the corrosion potential and current, suggesting that Ru is anodically polarised by CAN as an oxidising additive. To characterise the influence of CAN, open-circuit potential (OCP) and potentiostatic anodic current transient curves were examined in CAN-containing HNO3 solution and the resulting surfaces were then characterised by scanning electron microscopy and X-ray photoelectron spectroscopy. It is proposed that Ru is oxidised to heterogeneous Ru 2O3 and RuO2 films on the Ru surface in CAN-containing HNO3 solution and galvanic corrosion occurs at grain boundaries, caused by the difference in OCP between the grain interiors and boundaries. The grain boundaries are oxidised to RuO4, a volatile species, resulting in a roughened and porous structure.

AB - In order to develop a new chemical mechanical polishing process for ruthenium (Ru), the present work deals with the effect of a ceric ammonium nitrate (CAN) additive on the electrochemical behaviour of physical vapour deposited Ru films in a l M HNO3 solution employing electrochemical methods and surface analytical techniques. By adding CAN to HNO3 solution, the polarisation curves showed an increase in the corrosion potential and current, suggesting that Ru is anodically polarised by CAN as an oxidising additive. To characterise the influence of CAN, open-circuit potential (OCP) and potentiostatic anodic current transient curves were examined in CAN-containing HNO3 solution and the resulting surfaces were then characterised by scanning electron microscopy and X-ray photoelectron spectroscopy. It is proposed that Ru is oxidised to heterogeneous Ru 2O3 and RuO2 films on the Ru surface in CAN-containing HNO3 solution and galvanic corrosion occurs at grain boundaries, caused by the difference in OCP between the grain interiors and boundaries. The grain boundaries are oxidised to RuO4, a volatile species, resulting in a roughened and porous structure.

UR - http://www.scopus.com/inward/record.url?scp=0742290228&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0742290228&partnerID=8YFLogxK

U2 - 10.1023/B:JACH.0000005621.59716.39

DO - 10.1023/B:JACH.0000005621.59716.39

M3 - Article

AN - SCOPUS:0742290228

VL - 34

SP - 119

EP - 125

JO - Journal of Applied Electrochemistry

JF - Journal of Applied Electrochemistry

SN - 0021-891X

IS - 1

ER -