Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators

Hang Eun Joe; Jae Hyeong Park; Seong Hyeon Kim; Gyuho Kim; Martin B.G. Jun; Byung Kwon Min

doi:10.7567/JJAP.54.096602

Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators

Hang Eun Joe, Jae Hyeong Park, Seong Hyeon Kim, Gyuho Kim, Martin B.G. Jun, Byung Kwon Min

Department of Mechanical Engineering

Research output: Contribution to journal › Article

2 Citations (Scopus)

Abstract

Focused ion beam (FIB) machining of insulators is a crucial process in the rapid prototyping of nanodevices for optical applications. A conductive material is generally coated on the insulator prior to FIB machining to achieve high fabrication accuracy. In this paper, we report on the effects on machining accuracy of four coating materials: Pt, Ni, Ag, and Co. The dimensional accuracy at channel sidewalls was improved by selecting a coating material that induces charge-carrier generation in a small range. The geometric and electrical characteristics of the FIB-machined surfaces were evaluated to elucidate the association between the fabrication accuracy and the range of charge-carrier distribution.

Original language	English
Article number	096602
Journal	Japanese journal of applied physics
Volume	54
Issue number	9
DOIs	https://doi.org/10.7567/JJAP.54.096602
Publication status	Published - 2015 Sep 1

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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Joe, H. E., Park, J. H., Kim, S. H., Kim, G., Jun, M. B. G., & Min, B. K. (2015). Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators. Japanese journal of applied physics, 54(9), [096602]. https://doi.org/10.7567/JJAP.54.096602

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