Abstract
Focused ion beam (FIB) machining of insulators is a crucial process in the rapid prototyping of nanodevices for optical applications. A conductive material is generally coated on the insulator prior to FIB machining to achieve high fabrication accuracy. In this paper, we report on the effects on machining accuracy of four coating materials: Pt, Ni, Ag, and Co. The dimensional accuracy at channel sidewalls was improved by selecting a coating material that induces charge-carrier generation in a small range. The geometric and electrical characteristics of the FIB-machined surfaces were evaluated to elucidate the association between the fabrication accuracy and the range of charge-carrier distribution.
| Original language | English |
|---|---|
| Article number | 096602 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 54 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2015 Sep 1 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
Cite this
}
Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators. / Joe, Hang Eun; Park, Jae Hyeong; Kim, Seong Hyeon; Kim, Gyuho; Jun, Martin B.G.; Min, Byung Kwon.
In: Japanese Journal of Applied Physics, Vol. 54, No. 9, 096602, 01.09.2015.Research output: Contribution to journal › Article
TY - JOUR
T1 - Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators
AU - Joe, Hang Eun
AU - Park, Jae Hyeong
AU - Kim, Seong Hyeon
AU - Kim, Gyuho
AU - Jun, Martin B.G.
AU - Min, Byung Kwon
PY - 2015/9/1
Y1 - 2015/9/1
N2 - Focused ion beam (FIB) machining of insulators is a crucial process in the rapid prototyping of nanodevices for optical applications. A conductive material is generally coated on the insulator prior to FIB machining to achieve high fabrication accuracy. In this paper, we report on the effects on machining accuracy of four coating materials: Pt, Ni, Ag, and Co. The dimensional accuracy at channel sidewalls was improved by selecting a coating material that induces charge-carrier generation in a small range. The geometric and electrical characteristics of the FIB-machined surfaces were evaluated to elucidate the association between the fabrication accuracy and the range of charge-carrier distribution.
AB - Focused ion beam (FIB) machining of insulators is a crucial process in the rapid prototyping of nanodevices for optical applications. A conductive material is generally coated on the insulator prior to FIB machining to achieve high fabrication accuracy. In this paper, we report on the effects on machining accuracy of four coating materials: Pt, Ni, Ag, and Co. The dimensional accuracy at channel sidewalls was improved by selecting a coating material that induces charge-carrier generation in a small range. The geometric and electrical characteristics of the FIB-machined surfaces were evaluated to elucidate the association between the fabrication accuracy and the range of charge-carrier distribution.
UR - http://www.scopus.com/inward/record.url?scp=84941009189&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84941009189&partnerID=8YFLogxK
U2 - 10.7567/JJAP.54.096602
DO - 10.7567/JJAP.54.096602
M3 - Article
AN - SCOPUS:84941009189
VL - 54
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 9
M1 - 096602
ER -