Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators

Hang Eun Joe, Jae Hyeong Park, Seong Hyeon Kim, Gyuho Kim, Martin B.G. Jun, Byung Kwon Min

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Focused ion beam (FIB) machining of insulators is a crucial process in the rapid prototyping of nanodevices for optical applications. A conductive material is generally coated on the insulator prior to FIB machining to achieve high fabrication accuracy. In this paper, we report on the effects on machining accuracy of four coating materials: Pt, Ni, Ag, and Co. The dimensional accuracy at channel sidewalls was improved by selecting a coating material that induces charge-carrier generation in a small range. The geometric and electrical characteristics of the FIB-machined surfaces were evaluated to elucidate the association between the fabrication accuracy and the range of charge-carrier distribution.

Original languageEnglish
Article number096602
JournalJapanese Journal of Applied Physics
Volume54
Issue number9
DOIs
Publication statusPublished - 2015 Sep 1

Fingerprint

Focused ion beams
machining
Machining
ion beams
insulators
Charge carriers
coatings
Fabrication
Coatings
fabrication
charge carriers
Conductive materials
Rapid prototyping
rapid prototyping

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Joe, Hang Eun ; Park, Jae Hyeong ; Kim, Seong Hyeon ; Kim, Gyuho ; Jun, Martin B.G. ; Min, Byung Kwon. / Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators. In: Japanese Journal of Applied Physics. 2015 ; Vol. 54, No. 9.
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Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators. / Joe, Hang Eun; Park, Jae Hyeong; Kim, Seong Hyeon; Kim, Gyuho; Jun, Martin B.G.; Min, Byung Kwon.

In: Japanese Journal of Applied Physics, Vol. 54, No. 9, 096602, 01.09.2015.

Research output: Contribution to journalArticle

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