Effects of defects in SiO2 thin films prepared on polyethylene terephthalate by high-temperature E-beam deposition

Jin Woo Han, Hee Jin Kang, Jong Hwan Kim, Dae Shik Seo

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In this study, we characterized silicon oxide (SiO2) thin film prepared on polyethylene terephthalate (PET) substrates by electron-beam (e-beam) deposition for transparent barrier application. As the chamber temperature is increased from 30 to 110°C, the roughness increases while water vapor transmission rate (WVTR) decreases. Under these conditions, WVTR of PET can be reduced from a level of 0.57 g/m2/day (bare subtrate) to 0.05 g/m2/day after application of a 200-nm-thick SiO2 coating at 110°C. A more efficient way to improve permeation of PET was carried out by using a double sided coating of a 5-μm-thick parylene film. It was found that WVTR for PET substrates can be reduced to a level of -0.2 g/m2/day. The double-sided parylene coating on PET could contribute in lowering the stress of oxide film, which greatly improves the WVTR data. These results indicate that the Sip2/parylene/PET barrier coatings have a high potential for flexible organic light-emitting diode (OLED) applications.

Original languageEnglish
Pages (from-to)L827-L829
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume45
Issue number29-32
DOIs
Publication statusPublished - 2006 Aug 11

Fingerprint

polyethylene terephthalate
Polyethylene terephthalates
Thin films
Water vapor
Defects
water vapor
defects
thin films
coatings
Coatings
Temperature
Oxide films
Silicon oxides
Organic light emitting diodes (OLED)
Substrates
silicon oxides
Thick films
Permeation
thick films
oxide films

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

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abstract = "In this study, we characterized silicon oxide (SiO2) thin film prepared on polyethylene terephthalate (PET) substrates by electron-beam (e-beam) deposition for transparent barrier application. As the chamber temperature is increased from 30 to 110°C, the roughness increases while water vapor transmission rate (WVTR) decreases. Under these conditions, WVTR of PET can be reduced from a level of 0.57 g/m2/day (bare subtrate) to 0.05 g/m2/day after application of a 200-nm-thick SiO2 coating at 110°C. A more efficient way to improve permeation of PET was carried out by using a double sided coating of a 5-μm-thick parylene film. It was found that WVTR for PET substrates can be reduced to a level of -0.2 g/m2/day. The double-sided parylene coating on PET could contribute in lowering the stress of oxide film, which greatly improves the WVTR data. These results indicate that the Sip2/parylene/PET barrier coatings have a high potential for flexible organic light-emitting diode (OLED) applications.",
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Effects of defects in SiO2 thin films prepared on polyethylene terephthalate by high-temperature E-beam deposition. / Han, Jin Woo; Kang, Hee Jin; Kim, Jong Hwan; Seo, Dae Shik.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 45, No. 29-32, 11.08.2006, p. L827-L829.

Research output: Contribution to journalArticle

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