Effects of misfit strain on properties of ZnO films grown by pulsed laser deposition

M. C. Park, W. H. Yoon, D. H. Lee, J. M. Myoung, S. H. Bae, S. Y. Lee, I. Yun

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

A series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of misfit strain on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 400 nm are under the severe misfit strain, which decreases as the film thickness increases further.

Original languageEnglish
Pages (from-to)99-104
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume696
Publication statusPublished - 2002 Jan 1
EventCurrent Issues in Heteroepitaxial Growth Stress Relaxation and Self Assembly - Boston, MA, United States
Duration: 2001 Nov 262001 Nov 29

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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