Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition

Yujin Lee, Seunggi Seo, Il Kwon Oh, Sanghun Lee, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition'. Together they form a unique fingerprint.

Engineering

Chemistry

Physics

Material Science

Chemical Engineering