Effects of plasma nitridation on the electrical properties of nitrided oxide gate dielectric for DRAM application

Jin Hwa Heo, Dong Chan Kim, Bon Young Koo, Ji Hyun Kim, Chul Sung Kim, Young Jin Noh, Sung Kweon Baek, Yu Gyun Shin, U. In Chung, Joo Tae Moon, Mann Ho Cho, Kwun Bum Chung, Dae Won Moon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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