Effects of post-metallization annealing of high-K dielectric thin films grown by MOMBE

Minseong Yun, Myoung Seok Kim, Young Don Ko, Tae Hyoung Moon, Jang Hyuk Hong, Jae Min Myoung, Ilgu Yun

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11 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy