Effects of self-assembled monolayer and PFPE lubricant on the wear characteristics of flat silicon tips

Hyun Joon Kim, Cheol Eun Jang, Dae Eun Kim, Yong Kwan Kim, Seungbum Hong, Sung Hoon Choa

Research output: Contribution to conferencePaper

Abstract

In this work the effects of Self-Assembled Monolayer (SAM) and PFPE lubricant on the wear characteristics of flat silicon tips were investigated. The wear test consisted of sliding the silicon tips fabricated on a flat silicon specimen against SAM and PFPE coated Pb(Zr,Ti)O3 specimen and silicon (100) wafer. The tips were slid at low speed for about 15 km under an applied load of 4 mgf. The wear volume of the tip was obtained by measuring the tip profile using an AFM. It was found that the coatings were effective in reducing the wear of the tips by almost an order of magnitude. As for the counter surface, particles were observed near the sliding track when no coating was applied and the wear depth of less than 1 nm was detected. On the contrary, insignificant amount of particles were seen on the track of the counter surface when the coating was applied.

Original languageEnglish
Publication statusPublished - 2008 Dec 1
Event2008 Annual Meeting of the Society of Tribologists and Lubrication Engineers, STLE 2008 - Cleveland, OH, United States
Duration: 2008 May 182008 May 22

Other

Other2008 Annual Meeting of the Society of Tribologists and Lubrication Engineers, STLE 2008
CountryUnited States
CityCleveland, OH
Period08/5/1808/5/22

Fingerprint

Self assembled monolayers
Silicon
lubricants
Lubricants
Wear of materials
silicon
Coatings
coatings
sliding
counters
Silicon wafers
wear tests
low speed
atomic force microscopy
wafers
profiles

All Science Journal Classification (ASJC) codes

  • Colloid and Surface Chemistry
  • Process Chemistry and Technology
  • Surfaces and Interfaces

Cite this

Kim, H. J., Jang, C. E., Kim, D. E., Kim, Y. K., Hong, S., & Choa, S. H. (2008). Effects of self-assembled monolayer and PFPE lubricant on the wear characteristics of flat silicon tips. Paper presented at 2008 Annual Meeting of the Society of Tribologists and Lubrication Engineers, STLE 2008, Cleveland, OH, United States.
Kim, Hyun Joon ; Jang, Cheol Eun ; Kim, Dae Eun ; Kim, Yong Kwan ; Hong, Seungbum ; Choa, Sung Hoon. / Effects of self-assembled monolayer and PFPE lubricant on the wear characteristics of flat silicon tips. Paper presented at 2008 Annual Meeting of the Society of Tribologists and Lubrication Engineers, STLE 2008, Cleveland, OH, United States.
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Kim, HJ, Jang, CE, Kim, DE, Kim, YK, Hong, S & Choa, SH 2008, 'Effects of self-assembled monolayer and PFPE lubricant on the wear characteristics of flat silicon tips' Paper presented at 2008 Annual Meeting of the Society of Tribologists and Lubrication Engineers, STLE 2008, Cleveland, OH, United States, 08/5/18 - 08/5/22, .

Effects of self-assembled monolayer and PFPE lubricant on the wear characteristics of flat silicon tips. / Kim, Hyun Joon; Jang, Cheol Eun; Kim, Dae Eun; Kim, Yong Kwan; Hong, Seungbum; Choa, Sung Hoon.

2008. Paper presented at 2008 Annual Meeting of the Society of Tribologists and Lubrication Engineers, STLE 2008, Cleveland, OH, United States.

Research output: Contribution to conferencePaper

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AU - Jang, Cheol Eun

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AU - Hong, Seungbum

AU - Choa, Sung Hoon

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Kim HJ, Jang CE, Kim DE, Kim YK, Hong S, Choa SH. Effects of self-assembled monolayer and PFPE lubricant on the wear characteristics of flat silicon tips. 2008. Paper presented at 2008 Annual Meeting of the Society of Tribologists and Lubrication Engineers, STLE 2008, Cleveland, OH, United States.