Effects of self-assembled monolayer and pfpe lubricant on wear characteristics of flat silicon tips

H. J. Kim; C. E. Jang; D. E. Kim; Y. K. Kim; S. H. Choa; S. Hong

doi:10.1007/s11249-008-9386-2

Effects of self-assembled monolayer and pfpe lubricant on wear characteristics of flat silicon tips

H. J. Kim, C. E. Jang, D. E. Kim, Y. K. Kim, S. H. Choa, S. Hong

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

The effects of self-assembled monolayer (SAM) and perfluoropolyether (PFPE) lubricant on the wear characteristics of flat silicon tips were investigated. The wear test consisted of sliding the silicon tips fabricated on a flat silicon specimen against SAM and PFPE (Z-tetraol) coated silicon (100) wafer. The tips were slid at a low speed for about 15 km under an applied load of 39.2 μN. The wear volume of the tip was obtained by measuring the tip profile using an Atomic Force Microscope (AFM). It was found that the coatings were effective in reducing the wear of the tips by an order of magnitude from 10 ^-6 to 10 ^-7.

Original language	English
Pages (from-to)	61-73
Number of pages	13
Journal	Tribology Letters
Volume	34
Issue number	1 SPEC. ISS.
DOIs	https://doi.org/10.1007/s11249-008-9386-2
Publication status	Published - 2009 Apr

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "The effects of self-assembled monolayer (SAM) and perfluoropolyether (PFPE) lubricant on the wear characteristics of flat silicon tips were investigated. The wear test consisted of sliding the silicon tips fabricated on a flat silicon specimen against SAM and PFPE (Z-tetraol) coated silicon (100) wafer. The tips were slid at a low speed for about 15 km under an applied load of 39.2 μN. The wear volume of the tip was obtained by measuring the tip profile using an Atomic Force Microscope (AFM). It was found that the coatings were effective in reducing the wear of the tips by an order of magnitude from 10 -6 to 10 -7.",

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AU - Choa, S. H.

AU - Hong, S.

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AB - The effects of self-assembled monolayer (SAM) and perfluoropolyether (PFPE) lubricant on the wear characteristics of flat silicon tips were investigated. The wear test consisted of sliding the silicon tips fabricated on a flat silicon specimen against SAM and PFPE (Z-tetraol) coated silicon (100) wafer. The tips were slid at a low speed for about 15 km under an applied load of 39.2 μN. The wear volume of the tip was obtained by measuring the tip profile using an Atomic Force Microscope (AFM). It was found that the coatings were effective in reducing the wear of the tips by an order of magnitude from 10 -6 to 10 -7.

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Effects of self-assembled monolayer and pfpe lubricant on wear characteristics of flat silicon tips

Abstract

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