Effects of self-assembled monolayer and pfpe lubricant on wear characteristics of flat silicon tips

H. J. Kim, C. E. Jang, Dae Eun Kim, Y. K. Kim, S. H. Choa, S. Hong

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The effects of self-assembled monolayer (SAM) and perfluoropolyether (PFPE) lubricant on the wear characteristics of flat silicon tips were investigated. The wear test consisted of sliding the silicon tips fabricated on a flat silicon specimen against SAM and PFPE (Z-tetraol) coated silicon (100) wafer. The tips were slid at a low speed for about 15 km under an applied load of 39.2 μN. The wear volume of the tip was obtained by measuring the tip profile using an Atomic Force Microscope (AFM). It was found that the coatings were effective in reducing the wear of the tips by an order of magnitude from 10 -6 to 10 -7.

Original languageEnglish
Pages (from-to)61-73
Number of pages13
JournalTribology Letters
Volume34
Issue number1 SPEC. ISS.
DOIs
Publication statusPublished - 2009 Apr 1

Fingerprint

Self assembled monolayers
Silicon
lubricants
Lubricants
Wear of materials
silicon
Silicon wafers
Microscopes
wear tests
Coatings
low speed
sliding
microscopes
wafers
coatings
profiles
perfluoropolyether

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Kim, H. J. ; Jang, C. E. ; Kim, Dae Eun ; Kim, Y. K. ; Choa, S. H. ; Hong, S. / Effects of self-assembled monolayer and pfpe lubricant on wear characteristics of flat silicon tips. In: Tribology Letters. 2009 ; Vol. 34, No. 1 SPEC. ISS. pp. 61-73.
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Effects of self-assembled monolayer and pfpe lubricant on wear characteristics of flat silicon tips. / Kim, H. J.; Jang, C. E.; Kim, Dae Eun; Kim, Y. K.; Choa, S. H.; Hong, S.

In: Tribology Letters, Vol. 34, No. 1 SPEC. ISS., 01.04.2009, p. 61-73.

Research output: Contribution to journalArticle

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