Effects of substrate bias on the structural and field emission properties of diamond films

Jae Yeob Shim, Eung Joon Chi, Hong Koo Baik, Kie Moon Song, Se Jong Lee

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The effects of bias on modification of the structure, the surface morphology, and the field emission characteristic of diamond films have been examined by introducing positive substrate bias voltage during the hot filament chemical vapor deposition (HFCVD) process. The nondiamond carbon content incorporated during deposition increased significantly and the surface morphology lost their unique facet shape with increasing substrate bias voltage. The increase of nondiamond carbon content is attributed to both the increase of substrate temperature and the excessive generation of CHn radicals. The field emission properties were improved with increasing bias voltage.

Original languageEnglish
Pages (from-to)1040-1043
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number2
DOIs
Publication statusPublished - 2000 Mar

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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