Effects of substrates on carbon nitride thin films prepared by direct dual ion beam deposition

Physics

• Substrates 100%
• Thin Films 50%
• Ratios 50%
• Silicon 33%
• X Ray Spectroscopy 33%
• Ion Beams 33%
• Binding Energy 16%
• Raman Spectra 16%
• Amorphous Silicon 16%
• Nitrogen Ion 16%
• Growth 16%
• Value 16%
• Deposition 16%
• Silicon Nitride 16%
• Spectra 16%

Material Science

• Liquid Films 83%
• Thin Films 50%
• Auger Electron Spectroscopy 33%
• High-Resolution Transmission Electron Microscopy 33%
• Buffer Layer 16%
• Ion Beam Deposition 16%
• Amorphous Carbon 16%
• Crystalline Material 16%
• Density 16%
• Amorphous Silicon 16%